ISPC-4 / Zurich, Switzerland / August 27 - September 1, 1979 / Edited by S. Veprek and J. Hertz
TOPICAL MEETING ON INTERACTIONS OF LOW PRESSURE PLASMAS WITH SOLID SURFACES
		Effects of Low-Energy Ion Bombardment of Surfaces as Fundamental Processes in Plasma-Surface Interaction
	p1	E. TAGLAUER
		Control of Impurities in Controlled Fusion Machines
	p12	D.M. GRUEN
		Elementary Processes at Solid Surfaces Immersed in Low Pressure Plasmas
	p28	H.F. WINTERS
		Plasma Polymerization and Etching Mechanisms in Fluorocarbon Systems
	p30	E. KAY
		Hot Negative Ions by Sheath Manipulation
	p34	H.G. LERGON, K.G. MILLER
		The Role of the Heterogeneous Atom Recombination on the Particle Balance in an Oxygen DC Glow Discharge
	p40	L. LASKA, K. MASEK
		Many-Body Kinetic Semiphenomenological Approach to the Phenomena Caused by Ion Bomberdment in Solids
	p45	Y. KHAIT
		On a Possible Contribution of the Recombination Energy of Atoms to the Occurence of Heterogeneous Reaction in Molecular Glow Discharges
	p51	V. HERMOCH
		A Theory of Plasma Chemical Transport
	p56	C.B. ZAROWIN
		In Situ Thermogravimetry - a Tool for Quantitative Study of Plasma-Surface Interaction
	p79	S. VEPREK, A.P. WEBB
		Water Release from Stainless Steel Surfaces Exposed to .2 eV Atoms
	p90	K.J. DIETZ, I. ALT-KHAN, F. WAELBROECK, P. WIENHOLD
		Inconel Surface Composition Changes due to the Impingement of Atomic Hydrogen at Different Temperatures
	p96	J.v. SEGGERN, K.G. TSCHRRSICH
		Nitriding of Metals and Interaction of the Nitrides with a Low Pressure Hydrogen Plasma
	p100	C. BRAGANZA, S. VEPREK, E. WIRZ, H. STUSSI, M. TEXTOR
		Plasma Induced Arcs in a HF Discharge
	p109	K. HOTHKER, K. KOIZLIK, E. HINTZ
		On the Use of Fluorescence Spectroscopy for the Diagnostics of Low Density Plasmas
	p111	P. BCGEN, E. HINTZ, D. RUSBULDT
		Optimization of RF Discharges Used for Plasma Etching
	p113	J. TAILLET
		Reaction of Surfaces Exposed to Some Halogen Containing Plasmas
	p119	D.L. FLAMM, C.J. MOGAB
		Plasma Etching of Si by SF6, CF4 and SF6/H2 and CF4/H2 Mixtures
	p120	J.J. WAGNER, W.W. BRANDT
		Mass Spectrometric Study of Plasma and Surface Reactions During the Etching of Silicon in the Afterglow of a CF4/O2 Plasma
	p125	C.I.M. HEENAKKER, R.P.J. van de POLL
		A Low Pressure Reactive Ion Etching Technique
	p131	A. CETRONIO, G. IANNUZZI
		An Optical Detector for Monitoring Plasma Etching
	p139	B.J. CURTTS, H.R. BRUNNER
		Some Applications of a Simple Plasma System
	p146	J.E. CURRAN
		The Properties of Fluorocarbon Films Prepared by Plasma Polymerization of 1,3-Perfluorodimethylcyclohexane
	p152	G. KAGANOWICZ, P. DATTA, J.W. ROBINSON
		Study of the Plasma Deposition Processes of a-Si:H Films
	p164	G. TURBAN, Y. CATHERINE, B. GROLLEAU
		A Multipole DC Discharge for Thin Film Deposition from Silane Plasma
	p169	B. DREVILLON, J. HUC, A. LLORET, J. PERRIN, G. de ROSNY, J.P.M. SCHMITT
		Nitriding and Carburizing of Metals in a Radio Frequency Discharge
	p174	M. KONUMA, Y. KANZAKI, O. MATSUMOTO
		Polymerization of Organosilicones in Microwave Discharges
	p180	A.W. WROBEL, M.R. WERTHEIMER, H.P. SCHIEBER
		Use of a Multipole Plasma for the Oxidation of GaAs
	p181	S. GOURRIER, A. MIRECA, J.B. THEETEN, M. BACAL
ROUND TABLE ON THERMAL PLASMA PROCESSING
Session 1: Transport Phenomena
		Energy Transport in Thermal Plasmas
	p187	E. PFENDER
		Extractive Metallurgy - Overview
	p189	N.N. RYKALIN
		Plasma Processing of Oxide Systems in the Temperature Range 1000-3000 K
	p190	C.B. ALCOCK
		THE MEASUREMENT OF VELOCITY IN HOT MEDIA
	p192	M.R. BARRAULT
		Characteristics of Plasma Transferred Arcs
	p193	T. MEHMETOGLU, W.H. GAUVIN, F. KITZINGER
		Flow and Temperature Fields in a Free Discharge Inductively Coupled Plasma
	p195	R. GAGNE, M.I. BOULOS, R.M. BARNES
		Temperature and Pressure Measurements in a Low-Power Inductively Coupled Plasma Discharge
	p204	R.M. BARNES, R.G. SCHLEICHER, J.L. GENNA
		Turbulent Air Plasma Quenching in the Entrance Region of Narrow Passages
	p208	A. AMBRAZEVICIUS, E. SAKALAUSKIENE, P. VALATKEVICIUS
		Mathematical Modelling of Chemical Reactions in a Plasma Jet Reactor
	p213	P. BENEDEK, A. NEMETH, P. STETNGASZNER, P. VACZI
		Processing of Dispersed Phosphorite in the Plasma Reactor with Multi-Jet Mixing Chamber
	p219	I.S. BUROV, A.L. MOSSE, O.I. YASKO
Session 2: Extractive Metallurgy
		The Vapour Phase Reactions in Plasma Jet Augmented by Inductive Coupling of RF Power with DC Arc
	p224	K. AKASHI, M. NISHIMURA, R. TSHIZUKA
		Purification du Silicium Metallurgique par une Technique de Fusion de Zone sous Plasma
	p230	J. AMOUROUX, D. MORVAN
		Technical and Economical Studies for Metal Production by Plasma-Steelmaking Application
	p236	F. KASSABJI, B. PATEYRON, J. AUBRETON, P. FAUCHAIS, J. AMOUROUX, U. MORVAN
		The Industrial Application of Plasmas to Metallurgical Processes
	p247	G.R. KUBANEK, W.H. GAUVIN, G.A. IRONS, H.K. CHOI
		Theoretical and Experimental Results for Thermal Phosphate Dissociation in Plasma
	p249	A.L. MOSSE, I.S. BUROV, L.I. KRASOVSKAYA, O.I. YASKO
		The Production of Steel Powders by Hydrogen Reduction of Iron and Alloying Metal Chlorides
	p254	P.D. JOHNSTON
		Reduction and Dissociation of Molybdenum Compounds in a Transferred Plasma Arc
	p259	J.H. HARRINGTON
Session 3: Heterogeneous Processing in Thermal Plasmas
		Spheroidisation of Alumino-Silicate Particles in a Three Phase AC Plasma Furnace
	p265	D. GOLD, C. BONET, G. CHAUVIN, A.C. MATHIEU
		Formation of Superconducting Compounds, which are Metastable at Room Temperature, by Plasma Heating
	p271	O. MATSUMOTO, M. KONUMA, Y. KANZAKI
		Arc Gasification of Coal
	p277	C. SHEER, S. KORMAN, T.J. DOUGHERTY
		Arc Desulfurization of Coal
	p295	S. KCRMAN, T.J. DOUGHERTY, C. SHEER
		Erosion of Non-Refractory Cathodes in Arc Plasma Devices
	p305	A.E. GUILE
		Effects of Increasing Pressure on Transferred and Non-Transferred Arcs from a Plasma Cutting Torch
	p311	B. WALDIE
Session 4: Measuring Techniques
		A Thermogravimetrical Method for the Investigation of Solid-Plasma Ineractions
	p312	S. STRAMKE, H. WILHELMI
		UF6 Thermal Plasma and Associated Diagnostic Research
	p319	W.C. ROMAN
		Particles Velocity and Temperature Statistical Measurements in a DC Plasma Jet
	p325	A. VARDELLE, M. VARDELLE, J.M. BARONNET, P. FAUCHAIS
		LDA Measurements under Plasma Conditions
	p334	J.C. FANTON, J. LESINSKI, M.I. BOULOS
		Measurements of Temperatures in the Tail Flame of an Argon Induction Plasma
	p335	G.A. FARNELL, B. WALDIE
4TH INTERNATIONAL SYMPOSIUM ON PLASMA CHEMISTRY
		State of the Art of Plasma Chemical Synthesis of Homogeneous and Heterogeneous Products
	p336	P. FAUCHAIS, J.M. BARONNET
		Non-Equilibrium Chemical Kinetics and Entropy in Plasma Chemistry; Current Problems and Recent Results
	p338	L.S. POLAK
		The Prediction of Thermochemical and Kinetic Data for Gas Phase Reactions. Current Status
	p339	S.W. BENSON
		Progress in the Kinetics of Non-Equilibrium Plasmas
	p340	M. CAPITELLI
		Plasma Sampling - a Versatile Tool in Plasma Chemistry
	p342	H. HELM, T.D. MARK, W. LINDINGER
		Plasma Deposition and Etching Reactors for Semiconductor Applications
	p344	J.L. VOSSEN
		Thermal Plasma Technology for Processing of Refractory Materials
	p346	C. BONET
Session 1: Plasma Chemical Synthesis
		Nitrogen Oxides Synthesis in a DC Plasma Jet
	p349	J.M. BARONNET, J.F. COUDERT, J. RAKOWITZ, E. BOURDIN, P. FAUCHAIS
		Studies of Nitrogen Fixation in Glow Discharges
	p356	I. POLLO, W. GUZDEK
		Development of Nitric Oxide Synthesis in a DC Plasma Chemical Reactor
	p361	I. POLLO, K. HOFFMANN, L. FEDENCZUK
		Synthesis of Nitrogen Oxides in a Microwave Discharge
	p366	M. LOCQUENEUX, F. ETILE, R.I. BEN-AIM
		Etude de la Catalyse dans un Reacteur Chimique a Plasma hors d'Equilibre I. Systeme N2-CH4
	p372	D. RAPAKOULIAS, J. AMOUROUX
		Etude de la Catalyse dans un Reacteur Chimique a Plasma hors d'Equilibre II. Systeme N2-O2
	p378	S. CAVVADIAS, D. RAPAKOULIAS, J. AMOUROUX
		Decomposition of Propane in a Deuterium Plasma Jet
	p384	P. STEINGASZNER, L. VAJTA, E. DUDAS, I. SZEBENYI
		Pyrolysis of Propylene in Flowing Microwave Plasma
	p390	A. INSPEKTOR, U. CARMI, R. AVNI, H. NICKEL
		RR Reactions of Aromatic Compounds
	p396	L.L. MILLER, A. SZABO, S. BEZUK, M. TOKUDA
		Sensitized Conversion of Methane to Acetylene and Ethylene by Additions of Hg Vapour in a Thermal Plasma
	p402	H. DROST, H. BEHLKE, H.-J. SPANGENBERG
		The Direct Production of Acetylene by the Pyrolysis of Coal in Plasma Jets
	p408	M.J. GARRATT, K. LITTLEWOOD
		Electron Kinetics in Beam Discharge Plasma and Comparison of Plasma-Beam and Glow Discharge Reactors
	p421	A.A. IVANOV, V.V. STARYKH, J. WILHELM, R. WINKLER, S.I. KRASHENINNIKOV, V.V. PHYLUSHKIN
		Investigation of Dissociation and Synthesis in Plasma Chemical Reactors Based on Plasma-Beam Discharge
	p427	A.M. ALECSEEV, V.M. ATAMANOV, E.M. ERASTOV, A.A. IVANOV, S.I. KRASHENINNIKOV, G.B. LEVADNIJ, Yu.F. NASEDKIN, V.A. NICKIFOROV, Yu.M. PUSTOVOIT, V.V. SHAPKIN, T.K. SOBOLEVA, E.P. TSVETKOV
		Reduction of SiC14 in Hydrogen RF Discharges at Low Pressures
	p433	G. BRUNO, P. CAPEZZUTO, V. COLAPRICO, R. D'AGOSTINO, F. CRAMAROSSA
		Synthesis in an RF Plasma Reactor of Silica Powders Doped with Alumina
	p438	J. CANTELOUP, R. TUETA, M. BRAGUIER
		Silicon Carbon Coatings Produced by a Low Pressure Non-Equilibrium RF Plasma
	p444	M. KATZ, A. GRILL, D. ITZHAK, R. AVNI
		Some Aspects on the Dependency of Plasma Coating with Pressure
	p449	Y.L. KHAIT, A. INSPEKTOR, R. AVNI
		Non-Equilibrium Dissociation of Diatomic Species of Laser Interest: HCl
	p454	C. GORSE, M. DILONARDO, M. CAPITELLI
		Decomposition and Oxydation of SF6 in Flow RF Plasma Reactor
	p460	G. BRUNO, P. CAPEZZUTO, F. CRAMAROSSA, R. D'AGOSTINO, O. LATROFA, F. MOLINARI
		Products of Freon Plasmas
	p466	D.L. FLAMM
		Preparation of 1-Fluoroacetylenes in a Tesla Excited Discharge
	p467	G. BIERI
		The Dissociation Mechanism of some Inorganic Fluorides in the Optical Breakdown Plasma
	p473	A.V. ELETSKTI, V.D. KLIMOV, V.A. LEGASOV
		Investigation of Fluorine Dissociation in the Positive Column (PC) of the Glow Discharge (GD) in the Presence of Noble Gases. Spectral Characteristics and Physical Parameters of PCGD Plasma in Fluorine, Neon and (Ne+F2) Mixture
	p477	V.D. KLIMOV, V.A. LEGASOV, V.V. ZAITSEV, E.Yu. ZVEROVSKAYA
		Desulfuration of Sulfones
	p483	D. IACOCCA, H. SUHR, St. WIZEMANN, P. HENNE, H. GRUNWALD
		Treatment of Fibrous Materials in Glow Discharge
	p486	A.E. PAVLATH, R.C. LANDWEHR
		Kinetic and Crystallographic Aspects of Nitriding of Metals in a Low Pressure Nitrogen Plasma: Niobium and Molybdenum
	p492	E. WIRZ, H.R. OSWALD, S. VEPAEK
		The Nitriding of Fine Metallic Powder in a Low Pressure RF Discharge
	p494	Y. TANIGUCHI, K. AKASHI
Session 2: Elementary Reactions
		Formation of Small and Large Ions in Rich and Sooting Ethylene and Acetylene Premixed Flames
	p499	J.L. DELFAU, P. MICHAUD, A. BARASSIN
		Mobilities and Longitudinal Diffusion Coefficients of CHx+ Ions in He. Reactions of CH3+ with NH3
	p505	R. THOMAS, J. BARASSIN, A. BARASSIN
		Production and Loss of Krn+ (n = 1,2,3,4) and Kr2+ in a Low Pressure Krypton Discharge
	p511	I. KUEN, F. HCWORKA
		Reactions of State Selected Ar++(3P) and Ar++(1S) and of Ne++ Ions with Various Neutrals
	p517	H. VILLTNGER, E. ALGE, K. PESKA, H. STORI, H. RAMLER, W. LINDINGER
		The Influence of Ion Vibrational Excitation on Ion Molecule Reactions
	p522	E. ALGE, H. VILLINGER, K. PESKA, H. STORI, W. LINDINGER, D.L. ALBRITTON, F.C. FEHSENFELD
		Reactions of Ar+(2P1/2) and Ar+(2P3/2) in Argon
	p528	M. GROSSL, H. HELM, T.D. MARK, M. LANGENWALTER
		Reaction Mechanisms in Nonequilibrium Plasmas Studied by Isotopic Labelling
	p534	H. SUHR, U. KUNZEL
		Chemiluminescence Studies of Lithium Atom Reactions with Halogen Gases (Cl2, Br2) and Halogenated Gases (SF6, CH2Cl2, CF2Cl2)
	p539	U. KREUTLE, H. NEUERT, M. ROEDER
		Kinetic Study of N-N Recombination in a N2-H2 Post Discharge
	p545	L. HOCHARD, A. PLAIN, A. RICARD
		On the Plasma Chemistry of Atomic Oxygen Within and Downstream from a DC Discharge in Flowing O2
	p550	H. SABADIL
		Electronic Dissociation and Ionisation Cross Sections of Diatomic Molecules in Different Vibrational Levels
	p556	M. CACCIATORE, M. CAPITELLI
		Raman Spectroscopy of Simple Organic Liquids in an External Electric DC Field
	p562	M.E. LIPPITSCH, H.M. NOLL, F.R. AUSSENEGG
		Molecular Vibratory Behaviour under High Electric Field Strength
	p565	K.P. WISSEROTH
Session 3: Diagnostics and Production of Plasma
		New Insights into the Kinetics of Plasma Pyrolytic Methane Conversion from Single Pulse Shock Tube Investigations
	p571	H.-D. KLOTZ, H. DROST, H.-J. SPANGENBERG
		Mass Spectrometric Analysis of Reaction Between C and H in Arc Plasma
	p577	N. IKONOMOV, N. KOVACIC, M. TODOROVIC, M. ZDRAVESKI
		Effect of Fluorine on the Plasma Composition of DC Arc Free Burning in Air
	p583	J. RADIC-PERIC, M. PERIC, V.M. VUKANOVIC
		Kinetic Aspects of Plasma Chemical Processes in Diffuse Gas Discharges Affected by Turbulence
	p589	Y. KHAIT
		Determination of Temperature and Velocity of an Arc Heated, Subsonic Plasma Jet Issuing from a Plasma Torch
	p590	F. REUTER, H. KREMER
		Linear Stability Analysis of a Two Dimensional Arc
	p596	P.S. AYYASWAMY, I.M. COHEN, G.C. DAS
		Laser-Doppler Systems for Plasma Diagnostics: A Review and Prospective paper
	p603	G. GOUESBET, S. GREHAN
		Measurements of the Electric Wind in a Corona Discharge with Laser-Doppler-Velocimetry
	p617	B. ADAM
		Plasma Mass Spectrometry for Thin Film Process Control
	p622	D. HOFMANN, R. WECHSUNG
		Transfer Phenomena of Material Between the Electrodes in a Corona Discharge; Application to Surface Treatment and Catalytic Processes
	p628	A. GOLDMAN, C. KROLIKOWSKI, J. RATAJCZAK
		Microstructure of Non-Refractory Arc Cathode Roots in Plasma Devices with Magnetic Rotation of the Arc
	p629	A.E. GUILE
		Diagnostics in the RF-Ion Source RIG 10 Proposed for Neutral Injection
	p635	J. FREISINIGER, S. REINECK, H.W. LOEB
		Optimization of the Discharge Chamber Length of the RF Ion Source RIG 10
	p641	J. FREISINIGER, R. THURINGER, R.J. WALTHER
		"Local" Vibro-Rotational Analysis of Non-Equilibrium Nitrogen Plasma at Moderate Pressures
	p647	F. CRAMAROSSA, S. DE BENEDICTIS, G. FERRARO
		Spectroscopic Study of N2-O2 High Pressure UHF Plasma
	p652	A. RICARD, F. ETILE, M. LOCQUENEUX
		Superhigh Frequency Power Absorption by the Plasma Discharge
	p662	S.V. GRUSHETSKII, A.P. DOSTANKO, O.I. YAS'KO
		Some Properties of Low Pressure Discharge in Ar-SiH4 Atmosphere
	p663	P. KOCIAN, J.M. MAYOR, S. BOURQUARD
		Plasma Chemical Processes in High-Pressure CO2 Lasers
	p669	P. BLETZINGER, C. DE JOSEPH Jr
		Interaction of Narrow Beam with Plasma
	p675	O.N. AZAROVA, A.A. IVANOV, F.F. KAMENETZ, T.K. SOBOLEVA
		Stationary Beam Plasma Discharge in Crossed Electric and Magnetic Fields as a Device for Separation of Plasma Chemistry Reaction Products
	p681	K.K. GADEEV, A.A. IVANOV, V.V. SEVERNY, V.V. SHAPKIN
		Separation of the Products of Plasma Chemical Reactions in Masses in Plasma Immersed in Crossed E and H Fields in the Presence of Neutral Gas with High Ionization Potential
	p687	A.A. IVANOV, N.N. TIMCHENKO, B.J. KHRIPUNOV, V.V. SHAPKIN
		Mass Separation Processes in a Rotating Weakly Ionized Plasma
	p691	O.V. KURKO
		The G-Scheme of Approximations to the Thermal Diffusion Factors: Explicit Formulae
	p697	O. SCHWEBEL, G. GOUESBET, J.N. LFTOULOUZAN, R. DARRIGO
Session 4: Engineering
		The Energy Economics of a New Route to Iron and Alloying Metal Powders
	p703	P.D. JOHNSTON
		An Electric Arc Heater Process to Produce Solar Grade Silicon
	p708	M.G. FEY, T.N. MEYER, W.H. REED
		The Reduction of Tetrachlorosilane by Sodium at High Temperature in a Laboratory Scale Experiment
	p716	J.V.R. HEBERLEIN, J.F. LOWRY, T.N. MEYER, D.F. CILIBERT
Specialized Session on Ozone Production
		Analysis of Reactions Active During the Formation of Ozone in a Gas Discharge
	p723	R. DAVIDSON, M. LECUILLER
		Optimization of Ozone Production in a Pulsed Homogeneous Oxygen Discharge
	p729	B. ELIASSON, U. KOGELSCHATZ
		The Influence of the Voltage Wave on the Formation of Ozone
	p735	J. SALGE, P. BRAUMANN
		Towards a Possible Industrial Production of Ozone with an Electron Beam Controlled Discharge
	p742	G. FOURNIER, J. BONNET, J. FORT, D. PIGACHE, M. LECUILLER
Specialized Session on Plasma Polymerization
		Plasma Polymerization of Hydrocarbon in Afterglow of Argon
	p748	S. MORITA, H. KAWAMURA, S. ISHIBASHI, M. NAWATA
		Plasma Polymerized Methyl-Methacrylate as an Electron Beam Resist
	p754	S. MORITA, J. TAMANO, S. HATTORI, M. IEDA
		Modification des Proprietes Adhesives du Polyethylene dans une Decharge Couronne pour Differentes Atmospheres de Gaz
	p759	J. AMOUROUX, M. TRAN, M. GOLDMAN
		Plasma Polymerization of Ethylene in an Atmospheric Pressure Discharge
	p765	K.G. DONOHOE, T. WYDEVEN
		Experimental and Theoretical Studies of the Plasma Polymerization of Ethane
	p772	R. JENSEN, A.T. BELL, M. SHEN
		Plasma-Initiated Polymerization of Methyl Methacrylate and other Monomers
	p773	Y. OSADA, R. JOHNSON, M. SHEN, A.T. BELL
		Silicon Nitride Production: On the Formation of Si3N4 Submicron Powders from SiCl4 and NH3 in an Arc Plasma Furnace
	p779	G. PERUGINI
		LDA Measurements under Plasma Conditions
	p786	J. LESINSKI, B. MIZERA-LESINSKA, J.C. FANTON, M.I. BOULOS
		Thermal Plasma in Extractive Metallurgy
	p792	N.N. RYKALIN
		Glow Discharge Amorphous Silicon for Passivation Layers
	p795	I. WEITZEL, R. PRIMIG, L. RISCH