ISPC-12 / Minneapolis, USA / August 21-25, 1995 / Edited by J.V. Heberlein, D.W. Ernie, J.T. Roberts |
Plenary Presentations |
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A.1.01 | Present and Future Modelling Approaches for Non-Equilibrium Plasmas at Low and High Pressures |
p3 | M.J. Kushner |
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A. 1.02 | Advanced Diagnostic Techniques for Thermal Plasmas |
p4 | J.R. Fincke, S.C. Snyder, W.D. Swank, D.C. Haggard |
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E.1.01 | New Frontiers in Thermal Plasma Processing |
p5 | M. Boulos |
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E. 1.02 | Future Prospects for Dry Etching |
p6 | K. Suzuki, N. Itabashi |
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H.1.1 | From Molecules to Particles in Silane Plasmas |
p7 | A.A. Howling, Ch. Hollenstein, C. Courteille, L. Sansonnens, J.-L. Dorier |
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J.1.01 | Design of Novel Nanocrystalline Composite Materials by Means of Plasma CVD |
p8 | S. Veprek |
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J.1.02 | Characterization of Low Pressure Plasmas Using Advanced Diagnostic Methods |
p9 | K.H. Wiesemann |
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M.1.01 | High Temperature Treatment of Waste: From Laboratories to the Industrial Stage |
p10 | R. Poiroux |
Modification of Polymer Surfaces and Deposition of Polymer Films |
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B. 1.01 | Self-Consistent Analysis of Low-Temperature Oxygen Plasma and Processes of its Interaction with Some Polymer Materials |
p13 | V. Rybkin, A. Bessarab, E. Kuvaldina, A. Maximov, V. Titov |
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I.1.01 | Plasmas and Polymers: From Laboratory to Large Scale Commercialization |
p14 | M.R. Wertheimer, H.R. Thomas, M.J. Perri, J.E. Klemberg-Sapieha, L. Martinu |
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B.1.02 | Chemical Reactions on Plasma Functionalized Polymer Surfaces |
p15 | J. Behnisch, A. Hollander, F. Mehdorn, H. Zimmermann, V.B. Ivanov |
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B. 1.03 | Nitrogen Plasma Treatment of Isotactic Polypropylene: Chemical Surface and Bulk Crystalline Structure Modifications |
p21 | F. Poncin-Epailiard, T. Falher, J.C. Brosse, J.Y. Buzare, J. Emery, A. Gibaud, A. Desert |
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B.1.04 | Plasma-Treatment of Polymers by Means of NH3-H2 RF Glow Discharges |
p27 | R. d'Agostino, M. Stendardo, P. Favia |
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B.1.05 | Introduction of Functional Groups on Polyethylene Surfaces in a Low Pressure Carbon-Dioxide Glow Discharge; a Mechanistic Study |
p33 | G.A. Takens, J.G. Terlingen, G.H.M. Engbers, J. Feijen |
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B.1.06 | Spectrochemistry of Plasma-Induced Free Radicals in Glucose-Based Polycarbohydrates |
p39 | M. Kuzuya, Y. Yamauchi, J. Niwa, S. Kondo |
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B.1.07 | Study of the Helium Plasma-Polypropylene Interactions. Effect on the Stability of the Wettability, Adhesion and Mechanical Properties of the Polymer |
p45 | M. Tatoulian, F. Arefi-Khonsari, I. Rouger-Mabille, J. Amouroux |
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B.1.08 | Adhesion of Copper to Plasma-Treated Fluoropolymers |
p51 | M.K. Shi, J.E. Klemberg-Sapieha, G. Czeremuszkin, L. Martinu, E. Sacher |
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I.1.02 | Plasma Polymerization of Acetylene in RF Box-Type Gas Discharge Reactor under Plug Flow Condition |
p57 | K. Senda, T. Uchida, G.K. Vinogradov, S. Morita |
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I.1.03 | Fixed Site Facilitated Transport in Cobalt Chelate Containing Plasma Polymers |
p63 | N.C. Morosoff, Y. Choe, N.E. Barr, V.T. Stannett, J.M. Skelly, A. L. Crumbliss |
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I. 1.04 | Mechanisms of Polymerization of Esters and Carboxylic Acids in a Radio Frequency-Induced Plasma |
p69 | A.P. Ameen, A.J. Beck, F.R. Jones, L. O'Toole, R.D. Short |
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I.1.05 | In Situ FTIR Investigation of Methyl Methacrylate Plasma, Plasma Polymerized Film and Reaction Mechanisms |
p75 | Y.V. Pan, D.D. Denton |
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I.1.06 | Plasma Synthesis of Polymeric Thin-Layer-Networks from High Molecular Weight Polysiloxanes |
p81 | F. Denes, A.M. Sarmadi, R.A. Young, J.L. Shohet |
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PB.1.29 | Preparation of Thin Films of Poly-Thiophen by Atmospheric Pressure Glow (APG) Plasma |
p87 | K. Tanaka, S. Okazaki, T. Inomata, M. Kogoma |
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I.1.08 | Energy Transfer from an Argon Plasma to Polystyrene Surface |
p93 | R.M. France, R.D. Short |
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PB.1.01 | Hydrophobic Fluorocarbon and Organo-Silicon Condenser Tube Coatings Deposited by Plasma Enhanced CVD |
p99 | M.P. Bonnar, B.M. Burnside, R.L. Reuben, J.I.B. Wilson, M. Liehr |
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PB.1.02 | Structural Analysis of Thin Film Prepared by Cold Remote Nitrogen Plasma Assisted Polymerization |
p105 | F. Callebert, R. Stephan, O. Dessaux, P. Goudmand |
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PB.1.03 | Study of the Decomposition Mechanisms of (SF6-N2) Mixtures and Their Interactions with a High Density Polyethylene Target |
p111 | A. Courtot, F. Arefi-Khonsari, J. Amouroux |
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PB.1.04 | Study of the Plasma-Polyethylene Interactions in the Case of SF6 and SF6 - CF4 Non-Equilibrium Discharges |
p117 | Y. Khairallah-Abdelnour, F. Arefi-Khonsari, J. Amouroux, D. Leonard, P. Bertrand |
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PB.1.05 | Study of the Effect of an Ammonia or Oxygen Plasmas on the Physicochemical Modifications of PP Surface |
p123 | N. Shahidzadeh-Ahmadi, F. Arefi-Khonsari, M.M. Chehimi, J. Amouroux |
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PB.1.06 | Improved Dyeing Properties of SiCl4-Plasma Treated Polyester Fabrics |
p129 | A.M. Sarmadi, A.R. Denes, F. Denes |
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PB.1.07 | A Comparative Study of Plasma-State and PlasmaInduced Polymerization of Acrylonitrile for Modification of Cellophane Surfaces |
p135 | L.D. Nielsen, F. Denes, R.A. Young |
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PB.1.08 | Surface Amination of Polypropylene Fabrics under Melamine-RF-Cold-Plasma Conditions |
p141 | A.M. Sarmadi, X.F. Wang, F. Denes |
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PB.1.09 | Beryllium Containing Plasma Polymers; Their Preparation and Characterization |
p147 | N.C. Morosoff, N.E. Barr, W.J. James, R.B. Stephens |
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PB.1.10 | Plasma Induced Grafting of Styrene and (2-Chloroethyl)Vinyl Ether onto Polyethylene I. Investigation of Surface Changes |
p149 | A. Janke, K. Grundke, J. Bartella, H. Grunwald |
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PB.1.11 | Plasma Induced Grafting of Styrene and (2-Chloroethyl) Vinyl Ether onto Polyethylene II. Assessment of Biocompatability by Hepatocytes |
p155 | R. Gebhardt, K.E. Geckeler, H. Grunwald |
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PB.1.12 | The Effect of Plasma-Initiated Graft Copolymerization on Surface of PTMSP Membrane to its Gas Permselectivity |
p161 | X. Hou, J. Zhang, G. Li, Q. Sun |
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PB.1.13 | Design of Large Volume Remote Plasma Reactor. Relation Between the Functionalization and the Adhesion Quality of Polypropylene Surfaces Treated by a Remote Nitrogen Plasma |
p167 | B. Mutel, C. Hoyez, O. Dessaux, P. Goudmand, L. Gengembre, J. Grimblot |
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PB.1.14 | Plasma Surface Modification of Polymers Characterized by Ellipsometry |
p173 | R. Rochotzki, J. Meichsner |
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2.1-39 | Low Pressure Plasma Polymer Modification from the FTIR Point of View |
p179 | M. Nitschke, M. Zeuner, J. Meichsner |
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PB.1.16 | In Situ XPS and Ex Situ XPS and TOF-SIMS Studies of Nylon 6 and PMMA Treated in Remote O2 and O2-N2 Plasmas |
p185 | A. Scheuer, R. Prat, J.P Deville, D. Leonard, P. Bertrand |
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PB.1.17 | A Study of Gas Phase Processes in RF Plasma in the Mixture of Ar and Methylmethacrylate |
p191 | A.N. Shcheglov, A.V. Kovalchiuk, T.I. Yuranova., V.N. Vasilets, A.N. Ponomarev |
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PB.1.18 | Preparation and Properties of Hydrophilic Plasma Polymer Films |
p197 | H. Biederman, P. Hlidek, J. Jezek, D. Slavinska |
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PB.1.19 | Plasma and Vacuum Ultraviolet Initiated Polymerization of Mesogenic Monomers on the Surface of Fluorocarbon Polymers |
p203 | V.N. Vasilets, T.I. Yuranova, A.V. Kovalchiuk, A.N. Ponomarev, R.V. Talroze, E.R. Zubarev |
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PB.1.20 | Optical Emission Spectroscopy of Tetrafluoromethane Plasma as a Diagnostic of Surface Modification of Polymer |
p209 | W. Wang, F. Poncin-Epaillard, J.C. Brosse, D. Ausserre |
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PD. 1.21 | Functionalization of UHMW Poly(Ethylene) Membranes by a Carbon Dioxide Plasma Treatment |
p215 | J.G.A. Terlingen, M. ter Beek, J. Feijen |
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PB.1.22 | On the Dynamics of the Top Layer of Polysulfone Membranes During Plasma Treatment |
p221 | E. Aldea, G. Dinescu, G. Musa, G. Catana, B. Albu, G. Nechifor, G. Popescu, M. Olteanu |
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PB.1.28 | Surface Modification of Cellophane Films by Plasma Treatment for Membrane Applications |
p227 | N.V. Bhat, A.H. Joshi, S.M. Pawde |
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PB.1.23 | Reactive Ion Etching of Poly(Tetrafluoroethylene) in CF4/O2 Plasmas for Improvement of Copper Adhesion |
p233 | K.P. Lu, R.A. Clark, M. Hirsh, F.D. Egitto, L.J. Matienzo, G.A. Takacs |
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PB.1.24 | Silent Discharge Treatment of Biaxially Oriented Polypropylene |
p239 | R.D. Boyd, O.D. Greenwood, J. Hopkins, J.P.S. Badyal |
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PB.1.25 | Laser-Induced Fluorescence of CF and CF2 Radicals: An In-Situ Diagnostic for Polymer Treatment in CF4 Discharges |
p245 | A. Tserepi, T. Glasson, J.P. Booth, J. Derouard, N. Sadeghi |
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PB.1.26 | Reactions of Low Pressure Oxygen Plasmas with Liquid Aromatic Compounds |
p251 | P. Patino, M. Ropero, D. Iacocca |
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PB.1.27 | Mechanisms of Gas Phase Convertion and Polymerization in Nonequilibrium Plasma |
p257 | D.I. Slovetsky, A.l. Zimenok |
Large Area Plasma Sources |
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B.2.01 | RF Inductive Discharge Source Design for Large Area Processing |
p265 | A. Wendt, R.A. Breun |
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B.2.02 | Plasmachemical Activity of the Contact Region of Low Pressure Microwave Plasma Source Arrays |
p267 | A. Ohl, W. Schleinitz, J. Ropcke, M. Kaning |
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B.2.03 | A 30-cm-class Plasma Source Using Microwave Slot Antennas on a Rectangular Waveguide for Large Area Plasma Processing |
p273 | T. Yasui, H. Tahara, T. Yoshikawa |
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B.2.04 | Microwave Plasma Source Using Planar Ring-Cusp Magnetic Field and Reentrant Coaxial Cavity for Large Area Processing |
p279 | T. Yasui, H. Tahara, T. Yoshikawa |
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B.2.05 | A Large Volume Radio Frequency Plasma Source with a Magnetic Line-Cusp Field |
p285 | E. Yabe, T. Yajima, K. Takahashi, K. Nanri, T. Shiono, K. Kawamura, K. Takayama |
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B.2.06 | Application of a Large Area Inductive Ion Source to Diamond-Like Film Deposition |
p291 | P. Bletzinger, A. Garscadden, R.L.C. Wu, W. Lanter |
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B.2.07 | Generation of a Large Area Thermal Plasma by Induction Heating with 50-kHz Frequency High Power Source |
p297 | T. Sakuta, N. Sakashita, T. Takashima, M. Miyamoto, M. Yamada |
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PB.2.01 | Large Diameter Micro-Wave Plasma for Surface Treatment |
p303 | S. Bechu, C.B. Laporte, P. Leprince, J. Marec |
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PB.2.02 | Modelling of Profile Effects for the LLNL Large Area Inductive Coupled Plasma Source |
p309 | P. Vitello, G.J. Parker, N. Tishchenko, G. DiPeso |
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PB.2.03 | LLNL Large-Area Inductively Coupled Plasma (ICP) Source: Experiments |
p315 | R.A. Richardson, P.O. Egan, R.D. Benjamin |
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C.2.01 | Measurements of CFx and SiHx Radicals in ECR and RF Plasmas Used for Material Processing |
p323 | T. Goto |
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C.2.02 | Non-Local Behaviour of the Electron Component in Non-Equilibrium Plasmas |
p324 | R. Winkler |
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C.2.03 | Emission and Absorption Spectroscopy Measurements of Atomic Hydrogen Level Populations in Expanding Magnetised Plasma |
p325 | Z. Qing, D.K. Otorbaev, M.J.J. Eerden, G.J.H. Brussaard, M.C.M. van de Sanden, J.A.M. van der Mullen, D.C. Schram |
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C.2.04 | Spectroscopic Temperature Measurements in a H2 Microwave Discharge |
p331 | L. Tomasini, A. Rousseau, G. Gousset, P. Leprince |
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C.2.05 | Fourier Transform Infrared Diagnostics of Reaction Products during Electron Cyclotron Resonance Plasma Etching of Si in Cl2 |
p337 | K. Ono, K. Nishikawa, M. Tuda, T. Oomori |
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C.2.06 | Atomic and Molecular Beams from Electrical Discharges: Their Characterization and Applications Useful for Plasma Diagnostic and Chemical Modelling |
p343 | B. Brunetti, D. Cappelletti, S. Falcinelli, G. Liuti, F. Pirani |
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C.2.08 | Vacuum Ultraviolet to Visible Emission of Some Pure Gases Used for Plasma Processing |
p349 | A. Kruse, A. Fozza, M.R. Wertheimer |
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C.2.09 | An Efficient Two-Zone Model of Capacitively Driven Low-Pressure Gas Discharges |
p355 | R.P. Brinkmann, R. Fuerst |
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C.2.10 | Ion Kinetic Energy Distributions in a Compact ECR |
p361 | H.M. Wu, D.B. Graves |
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PC.2.01 | Laser Produced Carbon Plasma in an Ambient Gas |
p367 | S. Abdelli, T. Kerdja, D. Ghobrini, S. Malek |
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PC.2.02 | Measurements of N atom and N2(A) molecule densities in the flowing afterglow of a dinitrogen microwave plasma |
p373 | J.A. Andari, A.M. Diamy, L. Hochard, J.-C. Legrand, A. Ricard |
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PC.2.03 | In Situ Monitoring of Plasma Etching and Deposition by Using the Gas Pressure Difference |
p379 | J. Trnovec, V. Martisovits, I. Kosinar, M. Zahoran, R. Jurani |
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PC.2.04 | Fast Self-Consistent Kinetic Modelling of Low-Pressure RF Discharges |
p385 | S.V. Berezhnoi, I.D. Kaganovich, U. Kortshagen, L.D. Tsendin |
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PC.2.05 | Fractional Dissociation Measurements of H2 and D2 in Molecular Gas Mixtures in RF Discharges |
p391 | B.N. Ganguly, P. Bletzinger |
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PC.2.06 | The Effect of Excitation Frequency (f=10 kHz - 100 MHz) on the Formation of Excited Atoms and Radicals |
p397 | H. Uyama, T. Harada, N. Tomikawa |
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PC.2.07 | NO (X,v) Distributions in rf Discharges: Conditions for a Very High Vibrational Pumping |
p403 | S. De Benedictis, G. Dilecce, M. Cacciatore |
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C.2.07 | Diagnostics of Magnetically-Enhanced RF Discharge Plasmas in Methane: Absolute Density of Hydrogen Atoms |
p409 | S.V. Avtaeva, M.Z. Mamytbekov, D.K. Otorbaev |
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PC.2.08 | Relaxing Kinetics of N2(B3PIg,v) in Pulsed RF Discharges: Experimental Results and Mechanisms |
p415 | S. De Benedictis, G. Dilecce, M. Simek, M. Cacciatore |
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PC.2.09 | The Combined Thermal and RF-Plasma Activation of Chemical Reactions in the Model-System H2/I2/HI |
p421 | A. Dernier, S. Gundermann, F. Miethke, A. Rutscher, H.-E. Wagner |
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PC.2.10 | Experimental Design Study by Optical Emission of a Magnetron Sputtering Discharge |
p427 | M.F. Dony, A. Ricard, J.P. Dauchot, M. Wautelet, M. Hecq |
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PC.2.1 1 | Plasma Kinetic Model of DC Magnetron Reactive Sputtering in Ar-O2 Gas Mixtures |
p433 | A. Ershov, L. Pekker |
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PC.2.12 | In Situ Measurement of the Electric Conductivity of Plasma Deposited Films Using Langmuir Probes |
p439 | U. Flender, S. Rudakowski, K. Wiesemann |
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PC.2.13 | Surface and Volume Kinetics in a N2/O2 Low Pressure Glow Discharge |
p445 | B. Gordiets, C.M. Ferreira, J. Nahorny, D. Pagnon, M. Touzeau, M. Vialle |
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PC.2.14 | Self-Consistent Kinetic Model for a N2-O2 DC Glow Discharge |
p451 | V. Guerra, J. Loureiro |
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PC.2.15 | H Atom Density Measurements in H2 Microwave Discharge |
p457 | L. Tomasini, A. Rousseau, G. Gousset, P. Leprince |
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PC.2.16 | The Application of Cooled Probes for the Investigation of the Change of Chlorinated and Unsubstituted Hydrocarbons in Plasma Jets |
p463 | J. Lachmann, I. Borger, G. Schulz, G.B. Trusov |
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PC.2.17 | Similarity Principles of Non-Isothermal Plasma Chemical Reactors |
p469 | H. Jacobs, F. Miethke, A. Rutscher, H.E. Wagner |
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PC.2.18 | Low Energy Electron Collisions in SiF4 |
p475 | R. Nagpal, A. Garscadden, D. Liptak, J. Clark |
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PC.2.19 | Modelling of the Reactivity of Vibrationally Excited Molecules in a Corona Plasma for Catalytic Reactions |
p481 | M.A. Tas, R. van Hardeveld, E.M. van Veldhuizen, R.A. van Santen |
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PC.2.20 | Langmuir Probe Measurements of Plasma Parameters in a Planar Magnetron with Additional Plasma Confinement |
p487 | P.Spatenka, I.Leipner, J.Vlcek, J.Musil |
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PC.2.21 | Electrons and Ions in a Radio-Frequency Oxygen Plasma |
p493 | W.W. Stoffels, E. Stoffels, D. Vender, G.M.W. Kroesen, F.J. De Hoog |
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PC.2.22 | Ion Energy Distribution Functions in Microwave and Radio Frequency Plasmas |
p499 | P. Reinke, O. Zabeida, B. Andreani, S. Bureau, L. Martinu |
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PC.2.23 | Loss Process of Negative Charges in He+SF6 After-Glow Plasma in Pulse Modulated RF Discharge |
p505 | G. Tochitani, Y. Ohtsu, H. Nagata, H. Fujita |
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PC.2.24 | RF Plasma Monitoring Using Self Excited Electron Resonance Spectroscopy |
p511 | M. Klick, W. Rehak |
Etching |
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F.1.01 | Surface Chemistry During Plasma Etching of Silicon |
p519 | V.M. Donnelly, I.P. Herman, C.-C. Cheng, K.V. Guinn |
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F.1.02 | Measurements of Mass Dependent Ion Flux, Radical Concentrations and Polymer Film Growth During the Etching of SiO2 and Si with High Density Fluorocarbon Plasmas |
p521 | I. Abraham, R. Breun, N. Hershkowitz, K.H.R. Kirmse, J. Taylor, A. Wendt, R.C. Woods, J.Z., Wu, C. Yang |
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F.1.03 | Electron-Beam Injected Inductively Coupled Plasma Etching and Probe Measurements |
p527 | R. Inanami, G.K. Vinogradov, S. Morita |
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F. 1.04 | Does it Matter What Type of Source is Used for Plasma Etching of Semiconductors? |
p533 | N. Hershkowitz, R. Breun, J. Ding, K. Kirmse, C. Lai, J. Meyer, T. Quick, J. Taylor, R.C., Woods, J.Z. Wu, A. Wendt, C. Yang |
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F.1.05 | 2-D Imaging of CF2 Density by Laser-Induced Fluorescence of CF4 Etching Plasmas in the GEC rf Reference Cell |
p539 | B.K. McMillin, M.R. Zachariah |
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F.1.06 | The Chemistry of Halocarbon RF Plasmas Studied by Infrared Absorption Spectroscopy |
p545 | E. Stoffels, W.W. Stoffels, M. Haverlag, G.M.W. Kroesen, F.J. de Hoog |
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F.1.07 | Dry Etching of Si/SiGe Multiple Stacks: Process Control by Optical Emission Spectroscopy and Surface Analysis of Etched Films |
p551 | H.H. Richter, A. Wolff, B. Tillack, M. Szczypior, D. Kruger, C. Eggs |
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F.1.08 | Plasma Etching of High-Aspect-Ratio Interchip Vias for Vertical Integration of Chips |
p557 | M. Engelhardt |
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PF.1.01 | Patterning of Metal Oxide Transparent Electrodes for Flat Panel Displays using an Ar/Cl2 Based Reactive Ion Etch Process |
p563 | J. Molloy, P. Maguire, S. Laverty, J. McLaughlin |
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PF.1.02 | Bird's Head Planarization for Bipolar Devices |
p569 | C. Jehoul, M. Roussel, J. Durand |
Bulk Plasma Synthesis |
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B.3.01 | Investigation of Ozone Generation on Dielectric Surfaces |
p575 | R. Richter, G. Pietsch |
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B.3.02 | Direct Conversion from Methane to Methanol by a Pulsed Silent Discharge Plasma |
p581 | K. Okazaki, T. Nozaki, Y. Uemitsu, K. Hijikata |
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B.3.03 | Study of a Desulfurization Process under Plasma Conditions with ArIH2 Mixture |
p587 | M. Mohammedi, J.L. Leuenberger, J. Amouroux |
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B.3.04 | Cracking of Hydrocarbons in a Plasma Reactor with High Concentration of Activated Hydrogen: Interactions H°/CH3° Radicals and Effects on Hydrocarbons Conversion |
p595 | J.L. Leuenberger, M. Mohammedi, E. Francke, J. Amouroux |
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PB.3.07 | Kinetics of Chemical Reactions of Methane in the Flowing Afterglow of a Dinitrogen Microwave Plasma |
p601 | J.C. Legrand, A.M. Diamy, R. Hrach, V. Hrachova |
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B.3.06 | Reactive Plasma Upgrade of Squalane - A Heavy Oil Simulant |
p607 | P.C. Kong, A.D. Watkins, B.A. Detering, C.P. Thomas |
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B.3.07 | Production of Calcium Carbide in a Plasma-Jet Fluid Bed Reactor |
p613 | M.H. El-Naas, R.J. Munz, F. Ajersch |
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B.3.08 | Combined Plasma-Sorption Process for Producing Monosilane from Fluoride Raw Material |
p619 | I.N. Tumanov |
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PB.3.0 | Ozone Generation by Superimposing Silent Discharge and Ultraviolet Irradiation |
p625 | Y. Ehara, M. Ishizaka, H. Kishida, T. Ito |
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PB.3.02 | Control of Silicon Particles Velocities in RF Thermal Plasma by L.D.A. for Purification Process |
p631 | E. Francke, I. Cazard-Juvernat, M. Arnold, D. Morvan, J. Amouroux |
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PB.3.03 | The Use of Gas Mixtures in a DC Plasma Torch to Increase the Operating Voltage, while Maintaining Stability, and Application to an Inflight Reactor |
p637 | J.E. Harry, Q. Yuan |
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PB.3.04 | Processing of Uranium Hexafluoride in a Rotary Plasma Reactor |
p643 | A. Huczko, R. Li, M. Boulos |
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PB.3.05 | Temperature Measurement Based on C2 Swan Spectrum in a Transferred Arc in CH4 + CO2 Mixture |
p651 | H. Nassar, K. Meguernes, A. Czernichowski, J. Chapelle |
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PB.3.06 | Plasma Quench Technology for Natural Gas Conversion Applications |
p657 | B.A. Detering, P.C. Kong, C.P. Thomas |
High Pressure Non-Equilibrium Plasmas for Environmental Applications |
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C.1.01 | Electron Beam and Pulsed Corona Processing of Volatile Organic Compounds in Gas Streams |
p663 | B.M. Penetrante, M.C. Hsiao, J.N. Bardsley, B.T. Merritt, G.E. Vogtlin, P.H. Wallman, A. Kuthi, C.P. Burkhart, J.R. Bayless |
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C. 1.02 | Processing of Pollutants in Dielectric-Barrier in Plasma Reactors |
p665 | L.A. Rosocha, J.J. Coogan |
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C.1.03 | NOx-Reduction in Synthetic Air by Dielectric Barrier Discharges |
p671 | M. Klein, G. Lins, M Romheld, R.J. Seebock |
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C.1.04 | Modelling of the Removal of Nitric Monoxide from Exhausts by Dielectric Barrier Discharges |
p677 | W. Niessen, M. Neiger, R. Schruft |
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C.1.05 | Plasma Assisted N2O Oxidation and Reduction |
p683 | A. Fridman, B. Potapkin, M. Strelkova, A. Czernichowski, A. Charamel, A. Gorius |
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C. 1.06 | Purification Processes in Heterogeneous Non-Equilibrium Plasma |
p685 | B.V. Potapkin, M.A. Deminski, A.A. Fridman |
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C.1.07 | The Conversion of NO by a Corona Discharge Through a Catalyst Bed |
p691 | M.A. Tas, R. van Hardeveld, E.M. van Veldhuizen, R.A. van Santen |
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C.1.08 | Decomposition of Trichloroethylene by a Large Scale, High Flow Packed-Bed Gas Phase Corona Reactor |
p697 | B. Lerner, J. Birmingham, R. Tonkyn, S. Barlow, T. Orlando |
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C.1.09 | Plasma Assisted Spectroscopic Monitoring of Alkali Metals in Pressurized Combustion and Gasification |
p705 | V.T. Hayrinen, R.G. Hernberg |
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C.1.10 | The Use of Inductively Coupled Plasma Atomic Emission Spectrometry in Environmental Surveying and Geochemical Prospecting |
p711 | M. Odegard |
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PC.1.01 | Chemical Kinetic Modelling of Ar-CO2 Thermal Plasmas Under Reduced Gas Pressure Conditions |
p717 | T.G. Beuthe, J.S. Chang |
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PC.1.02 | Investigation on the Departures from Thermodynamic Equilibrium in a DC Plasma Jet |
p723 | M. Cao, D.V. Gravelle |
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PC.1.03 | Electrically Assisted Water Shift Reaction |
p729 | A. Czernichowski, K. Meguernes |
 |
PC.1.04 | Generation of Non-Thermal Transient Gas Discharges at Atmospheric Pressure for Pollution Control |
p735 | R. Kutzner, J.G.H. Salge |
 |
PC.1.05 | Modelling the Plasma Chemistry of a Pulsed Corona Discharge in Dry and Humid Air |
p741 | W.L. Morgan, M. Jacob, E.R. Fisher |
 |
PC.1.06 | Thermodynamic Aspects of Processes Taking Place in a Discharge Gap of an Ozonizer |
p747 | J. Ozonek, S. Fijalkowski, I. Polio |
 |
PC.1.07 | Ionizational Nonequilibrium in Thermal Air Plasmas |
p753 | C.O. Laux, R.J. Gessman, C.H. Kruger |
 |
PC.1.08 | The Distribution of Atomic Hydrogen in an Atmospheric-Pressure Free-Burning Arc Discharge |
p759 | S.C. Snyder, A.B. Murphy, D.L. Hofeldt, L.D. Reynolds |
 |
PC.1.09 | Generation of Microwave Cold Plasma at Atmospheric Pressure |
p765 | K. Sugiyama, K. Tsutsumi, A. Itoh, T. Matsuda |
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PC.1.10 | Thermal and Chemical Non-Equilibrium Flowfields in an Arcjet Expansion Nozzle for Low Pressure Plasma Processing |
p771 | H. Tahara, K. Komiko, T. Yasui, T. Yoshikawa |
 |
PC.1.11 | Diagnostic Study of DC Gliding Arc Discharge |
p777 | M. Simek, M. Clupek |
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PC.1.12 | Formation of a DC Glow Discharge at Atmospheric Pressure Using Solid Electrolyte |
p783 | Y. Torimoto, S. Yao, A. Harano, M. Sadakata |
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PC.1.13 | Study of Ar/CF4/H2 Inductively Coupled Plasma: Effect of Hydrogenated and/or Oxygenated Atmosphere. Comparison to Ar/CH4 System |
p789 | S. Al Ayoubi, M.F. Gonnord, S. Cavvadias, A. Ricard, J. Amouroux |
 |
PC.1.14 | Kinetical Modelling of Chemical Processes During Conversion of Chlorinated Hydrocarbons in a Thermal Plasma |
p795 | I. Borger, J. Lachmann, B.G. Trusov |
 |
PC.1.15 | Gliding Arc Treatment of Aqueous Solutions Near Atmospheric Pressure |
p801 | M. Chabchoub, J.L. Brisset, A. Czernichowski |
 |
PC.1.16 | Radical Oxidation Automotive De-NOx |
p807 | B. Chang, M. Garcia |
 |
PC.1.17 | OH Generation in Steam-Air Pulsed Corona |
p813 | M. Garcia, B. Chang |
 |
PC.1.18 | The Effect of Superimposed Discharge on the Decomposition of NOx in Exhaust Gas |
p819 | T. Ito, T. Nomura, H. Miyamoto, Y. Ehara |
 |
PC.1.19 | Industrial Trials of the GlidArc Plasma Reactor |
p825 | T. Janowski, H.D. Stryczewska, A. Ranaivosoloarimanana, A. Czernichowski |
 |
PC.1.20 | Spectroscopic Temperature Measurement in Dielectric Barrier Discharges |
p831 | M. Klein, M. Romheld, R.J. Seebock |
 |
PC.1.21 | Oxidation of Aromatic Hydrocarbon in a Low-Pressure Plasma Catalytic Fluidized-Bed Reactor |
p837 | M. Langleron, J.-L. Havet, S. Cavvadias, J. Amouroux |
 |
PC.1.22 | UV Emission and Chemical Kinetics of Positive Coronas as Envisaged for Flue Gas Treatment |
p843 | M. Jacob, T.H. Teich |
 |
PC.1.23 | Experimental Equipment for Toxic Substances Destruction Using Plasma Processing |
p849 | O. Coufal, J. Gregor, M. Hrabovsky, J. Senk, J. Teply |
 |
PC.1.24 | A Prevented Spark Reactor for Pollutant Control Investigation of NO, Removal |
p855 | R. Hafez, S. Samson, E. Marode |
Plasma Spraying |
 |
C.3.01 | Coating Generation: Vapor Cloud Surrounding a Particle Prior to Impact and Splat Formation |
p863 | M. Vardelle, A. Vardelle, P. Fauchais |
 |
C.3.02 | Application of Plasma Spraying to Solid Oxide Fuel Cell Production |
p864 | A. Notomi, N. Hisatome |
 |
C.3.03 | Suspension Plasma Spraying of Hydroxyapatite |
p865 | E. Bouyer, F. Gitzhofer, M.I. Boulos |
 |
C.3.04 | Particle Temperature and Residence Time Control for Reactive Spraying |
p871 | J.R. Fincke, W.D. Swank, D.C. Haggard |
 |
C.3.05 | Plasma Water Interactions in Underwater Plasma Spraying |
p877 | B. Waldie, W.K. Harris |
 |
C.3.06 | Analysis of Thermally Induced Defects in DC Plasma Sprayed Thermal Barriers by the Use of an Acoustic Emission Technique |
p883 | J. Voyer, F. Gitzhofer, M.I. Boulos, S. Durham |
 |
C.3.07 | Fume Generation Mechanism in Wire Arc Spraying |
p889 | T. Watanabe, X. Wang, J. Heberlein, E. Pfender |
 |
C.3.08 | Plasma Spraying of Porous Ni/ZRO2-Cermet Anodes for the Solid Oxide Fuel Cells |
p895 | E. Fendler, R. Henne, M. Lang |
 |
C.3.09 | Study of Deposition Offset in Plasma Spray of Zirconia |
p901 | W.H. Zhuang, D. Gray, K. Etemadi, D.M. Benenson |
 |
C.3.10 | Enhancement of Coating Uniformity with Secondary Gas Atomization in Wire Arc Spray |
p907 | X. Wang, J. Heberlein, E. Pfender, W. Gerberich |
 |
PC.3.01 | Thermal Cycling, Oxidation Behavior and Mechanical Properties of Graded and Duplex PSZ TBC Coatings |
p915 | J. Musil, M. Alaya, R. Oberacker |
 |
PC.3.02 | Comparative Analysis and Testing of a Different Theories Characterizing a Diameter and Thickness of Plasma Sprayed Splats |
p921 | O.P. Solonenko, A.V. Smirnov |
 |
PC.3.03 | Ceramic Coatings Using Quasi-Steady Magneto-Plasma-Dynamic Arcjet Generators |
p927 | H. Tahara, K. Mitsuo, T. Yasui, Y. Kagaya, T. Yoshikawa |
 |
PC.3.04 | Augmentation of Thermal Barrier Coatings by Small Particle Plasma Spray |
p933 | T. Bernecki |
Special Session on Heat Transfer in Plasma Processing |
 |
D.1.01 | Control of Substrate Temperature During Diamond Deposition |
p937 | M.T. Bieberich, S.L. Girshick |
 |
D.1.02 | Nozzle Optimization for Dissociated Species Transport in Low Pressure Plasma Chemical Vapor Deposition |
p938 | C. George, G. Candler, R. Young, E. Pfender, J. Heberlein |
 |
D.1.03 | DC-Plasma Torches with Diverging Nozzles for Advanced Plasma Spraying |
p939 | R.H. Henne |
 |
D.1.04 | Parameters Controlling the Generation and Properties of Plasma Sprayed Zirconia Coatings |
p940 | P. Fauchais, M. Vardelle, A. Vardelle, M. Bianchi, A.G. Leger |
 |
D. 1.05 | On the Spreading and Solidification of Molten Particles in a Plasma Spray Process: Effect of Thermal Contact Resistance |
p941 | M. Pasandideh-Fard, J. Mostaghimi |
 |
D.1.06 | Modelling of Nonequilibrium Effects in a High-Velocity Nitrogen-Hydrogen Plasma Jet |
p942 | C.H. Chang, J.D. Ramshaw |
 |
D.1.07 | Development of a Sensing & Control Technique for an Innovative Atmospheric Plasma CVD Process |
p943 | A.D. Watkins, S.C. Snyder, P.C. Kong |
 |
D.1.08 | Heat Transfer in Plasma Spraying |
p944 | G. Nutsch, W. Rother |
 |
D.1.09 | Isotope Separation by DC Arc Discharge |
p945 | M. Suzuki |
 |
D.1.10 | Fuzzy Logic Modelling for Process Optimization and Control |
p946 | B. Schaible, Y.C. Lee |
 |
F.2.01 | Co-Processing Conception of a Quenching Plasma Reactor Associated to a Fluidized Bed Designed to Hydrogen Radical Production at Low Temperature |
p947 | M.N. Mohammedi, S. Cavvadias, J.L. Leuenberger, E. Francke, J. Amouroux |
 |
F.2.02 | Diffusion Phenomena of a Cold Gas in a Thermal Plasma Stream |
p948 | M. Rahmane, G. Soucy, M.I. Boulos |
 |
F.2.03 | The Role of Radical and Cluster in Thermal Plasma Flash Evaporation Process |
p949 | Y. Takamura, K. Hayasaki, K. Terashima, T. Yoshida |
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F.2.04 | An Improved Method for the Calculation of Thermal Conductivities in the Low Temperature Region of Thermal Plasma Processes |
p951 | H. Wilhelmi, H. Bollmann, T. Caesar, W. Aretz, S.W. Metz |
 |
F.2.05 | High-Definition Plasma Spraying with Wire Feedstock |
p957 | J.R. Fincke, W.D. Swank, D.C. Haggard |
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F.2.06 | Studies on Plasma Heat Transfer |
p958 | A. Kanzawa |
 |
F.2.07 | Plasma-Particle Momentum Transfer under Conditions of Great Knudsen Numbers and Thin Plasma Sheath |
p959 | X. Chen |
 |
F.2.08 | Characterization of D.C. Plasma Torch Voltage Fluctuations |
p960 | J.F. Coudert, M.P Planche, P. Fauchais |
Environmental Applications of Plasma Chemistry |
 |
G.1.01 | Chemistry of the Electron Beam Process and its Application to Emission Control |
p963 | H. Matzing, W. Baumann, H.-R. Paur |
 |
G.1.02 | Characterization of Chemical Processes in Non-thermal Plasmas for the Destruction of Volatile Organic Compounds |
p965 | D.S. Green, L. Sieck, J.T. Herron |
 |
G.1.03 | Elimination of Organic Solvent in Air by Means of Plasma Technique |
p971 | Y.J. Ge, S.G. Chen, Z.S. Qiao, D.B. Wang, G.Q. Zhang |
 |
G.1.04 | Spectroscopic Measurement of Radical in Non-Equilibrium Plasma |
p977 | K. Habu, A. Harano, M. Sadakata, S. Hosokawa |
 |
G.1.05 | Stabilization of Trichlorotrifluoroethane(CFC-113) by Plasma Copolymerization with a Hydrocarbon Monomer |
p983 | O. Tsuji, M. Sawai, H. Nakamo, T. Minaguchi, T. Wydeven |
 |
G.1.06 | The Corona Discharge in Humid Air as an Oxidizing Tool for the Destruction of Aromatic Solutes |
p989 | V. Peulon, J.-L. Brisset |
 |
G.1.07 | Modelling of Capillary Tube Plasma Reactor Corona Discharge Parameters in Dry Air with Trace Volatile Organic Compounds |
p995 | J.S. Chang, K. Urashima, H. Thompson, T.A. Myint, A. Chakrabardi, T. Ito |
 |
G.1.08 | Calcite Fluidized Bed Reactor Heated by Argon-Hydrogen Plasma Jets for the Destruction of Carbofluorine Wastes |
p1001 | B. Pateyron, M.-F. Elchinger, G. Delluc, J. Erin, P. Fauchais |
 |
G.1.09 | 3-D Computer Simulation of Electron Beam Cleaning Processes |
p1009 | A.S. Petrusev, B.V. Potapkin, E.V. Shulakova, A.A. Fridman |
 |
G.1.10 | Plasma Treatment of Aluminum Dross |
p1015 | A. Takeuchi, H. Hashimoto, K. Tanaka |
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G.1.11 | The First Step to Industrialize Decomposition Process of Ozone Depleting Substances by Steam Plasma |
p1021 | S. Takeuchi, K. Takeda, N. Uematsu, H. Komaki, K. Mizuno, T. Yoshida |
 |
N.1.01 | Thermochemistry and Kinetics of Plasma Waste Destruction |
p1027 | T. McAllister |
 |
N.1.02 | The Destruction of Toxic Liquid Wastes in an Induction Plasma Reactor |
p1033 | E. Bergeron, G. Soucy, M. Boulos |
 |
N.1.03 | Investigation of the Pyrolysis of Chlorinated Hydrocarbons in an Argon Plasma Jet |
p1039 | B. Glocker, E. Messerschmid, S. Kanne, R. Berger |
 |
N.1.04 | Thermal Plasma Reduction of UF6 |
p1045 | J.R. Fincke, W.D. Swank, D.C. Haggard, B.A. Detering, P.C. Kong |
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N.1.05 | Destruction of CH3Cl Using Plasma Fluidized CaO Bed |
p1051 | H. Sekiguchi, N. Matsudera, A. Kanzawa |
 |
N.1.06 | Induction-Coupled Plasma Energy Recycle and Conversion (PERC) of Military Waste Streams |
p1057 | R.W. Smith, R. Mutharasan, R. Knight, D. Luu, K. Malladi, J. Serino, J. Vavruska, J. Persoon, M. Garrison |
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N.1.07 | Aluminum Can Recovery by Thermal Plasma |
p1063 | R.N. Szente, A.C. Cruz, L.B. Sousa |
 |
N.1.08 | Application of Plasma Arcs for the Pyrolysis of Mixed Solid/Liquid Waste Material |
p1069 | B.D. Sartwell, J.L. Giuliani Jr., J.W. Fleming, J.P. Apruzese |
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N.1.09 | Carbon Monoxide Production from CO2 Using DC Plasma Jets |
p1071 | M.D. Carabine, L.S. Vasanthakumar |
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N.1.10 | Incineration and Vitrification of Surrogate Nuclear Wastes by Thermal Plasma |
p1077 | C. Girold, R. Cartier, J.P. Taupiac, C. Vandensteendam, J.M. Baronnet, T. Flament |
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N.1.11 | Pulsed Positive Corona in Water |
p1083 | E.M. van Veldhuizen, W.R. Rutgers |
 |
PG.1.02 | Energy Consideration for Steam Plasma Gasification of Black Liquor and Chemical Recovery |
p1089 | J.D. Grandy, P.C. Kong |
 |
PG.1.03 | Parameters Study of Plasma Jet Behavior with a Numerical Simulator |
p1095 | K. Matsuyama, R. Yamamoto |
 |
PG.1.04 | Application of Hollow Anode Ion-Electron Sources in Plasma Chemistry |
p1101 | V. I. Miljevic |
 |
PG.1.05 | Chemical Kinetics Model for NO Reduction from Flue Gas Excited by Pulsed Corona Discharge |
p1107 | M. Yousfi, J. Hart, A. Hamani, A. Hennad, M. Benabdessadok, O. Eichwald |
 |
PG.1.06 | On the Use of the \"Electrical Wind\" to Improve the Removal Efficiency of Air Pollutants Treated by Corona Discharges |
p1113 | J. Pinart, A. Goldman, M. Goldman, M.-E. Pinart, V.D. Tessier |
 |
PG.1.07 | Decomposition of 1, 2-Dichloroethane in Hydrogen by Non-Equilibrium RF Plasma |
p1119 | G. Schulz, G. Birkhahn, I. Borger, J. Lachmann |
 |
PG.1.08 | Experimental Investigations of the Removal of Toxic Exhaust Gas Components by Dielectric Barrier Discharges |
p1125 | O. Wolf, F. Weiser, M. Neiger |
 |
PG.1.09 | Ozone for NOx Elimination from Waste Gases |
p1131 | J. Wolinska, I. Pollo |
 |
PG.1.10 | Physical-Chemical Mechanisms of NOx Oxidation Stimulated by Electron Beam |
p1137 | E.V. Shulakova, M.A. Deminsky, A.A. Fridman, B.V. Potapkin |
Synthesis of Particles and Clusters |
 |
G.2.01 | Analysis of Coulomb-Crystal Formation Process for Application to Tailored Particle Synthesis in RF Plasmas |
p1145 | K. Tachibana, Y. Hayashi |
 |
G.2.02 | Induction Plasma Synthesis of Ultrafine SiC |
p1146 | F. Gitzhofer |
 |
G.2.03 | Nanocrystalline Ceramic SiC, TiC and SiC-TiC Powders Produced in an RF Induction Plasma |
p1147 | H.-D. Klotz, R. Mach, F. Oleszak, K. Szulzewsky, W. Kramer, E. Schierhorn |
 |
G.2.04 | Synthesis of Ultrafine Powders by MW Plasma at Atmosphere Pressure |
p1153 | G.L. Zheng, S.C. Li, R.Y. Cheng |
 |
G.2.05 | Characterization of a 3-Phase AC Plasma Reactor for Carbon Black Synthesis from Natural Gas |
p1159 | L. Fulcheri, G. Flamant, B. Variot, B. Ravary, J.M. Badie |
 |
G.2.06 | Carbonization of Hexane and Toluene in an RF Thermal Plasma at Normal Pressure |
p1165 | J. Szepvolgyi, M.T. Beck, S. Keki, I. Mohai |
 |
G.2.07 | Carbon Clusters and Fullerene Formation in Turbulent Radial Jet from Graphite Contact Arc |
p1171 | G.I. Sukhinin, O.A. Nerushev |
 |
G.2.08 | The Plasma Production of Fullerenes |
p1177 | T. Alexakis, Y.S. Tsantrizos, J.L. Meunier, P.G. Tsantrizos |
 |
G.2.09 | Fullerene Formation in a Helium-Carbon Plasma |
p1183 | A. Huczko, H. Lange, P. Byszewski |
 |
G.2.10 | Deposition of C60 in the Microwave Plasmas |
p1189 | T. Ikegami, O. Matsumoto |
 |
G.2.11 | Thermal Plasma Modification of Titanium Carbide Powder - Numerical Analysis of Powder Behavior in Plasmas |
p1195 | T. Watanabe, A. Kanzawa, T. Ishigaki, Y. Moriyoshi |
 |
PG.2.01 | Analysis of the Synthesis of Ultrafine AIN Powders in an Induction Plasma Reactor |
p1201 | J.-F. Bilodeau, P. Proulx |
 |
PG.2.02 | Synthesis of Ultrafine Powders of Silica in a DC Transferred Plasma Arc Furnace |
p1207 | K. Chang, H. Ageorges, S. Megy, C. Vandensteendam, Ph. Rouhmilhac, J.M. Baronnet |
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PG.2.03 | Preparation of Ultrafine Calcia Powder by Air Plasma |
p1213 | Y. Fan, L. Fu, M. Zhang, J. Xiao, J. Young |
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PG.2.04 | Laserinduced Synthesis and Characterisation of Boron Doped Nanosized Silicon Carbide Powders |
p1219 | J. Forster, P. Buchner, J. Uhlenbusch |
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PG.2.05 | High Frequency Capacitor Plasmatorches for Synthesis of New Ceramic Powders at High Pressure |
p1225 | S. Dresvin, V. Goldfarb, J. Amouroux |
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PG.2.06 | Ultrafine SiC Synthesis Using Induction Plasmas: A Parametric Study |
p1231 | J.Y. Guo, F. Gitzhofer, M.I. Boulos |
 |
PG.2.07 | RF Induction Plasma Synthesis of Si3N4-SiC Composite Powders from Different Silanes and Silane Mixtures |
p1237 | R. Mach, H.-D. Klotz, H. Drost, I. Kosche, C. Olschewski, F. Zygalsky |
 |
PG.2.08 | Properties of Plasma Silica Powders used to Sapo Molecular Sieve Synthesis |
p1243 | G. Schulz, H. Geissler, M. Braun |
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PG.2.09 | Synthesis of a New Y-Fe-O Ultrafine Particles Using Inductively Coupled Plasma |
p1249 | M. Sugasawa, N. Kikukawa, N. Ishikawa |
 |
PG.2.10 | Synthesis of Silicon Nitride Nanopowders in an RF Thermal Plasma Torch: Comparative Study on Different Precursors |
p1255 | J. Szepvolgyi, I. Mohai, G. Baksa |
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PG.2.11 | Rapid Nitriding of Aluminum under Nitrogen Glow Plasma |
p1261 | S. Ito, K. Akashi, H. Takahashi, K. Yoshida |
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PG.2.12 | Plasma Arc Process for Producing Disperse Oxide Materials from Volatile Fluorides |
p1267 | I.N. Tumanov, V.A. Hohlov, V.D. Sigailo, S.A. Kuzminykh, S.D. Shamrin |
 |
PG.2.13 | Arc Plasma Process for Producing High-Quality Ceramic Materials from Solutions and Melts |
p1273 | I.N. Tumanov, V.A. Hohlov, V.D. Sigailo, V.B. Khodalev, S.D. Shamrin, A.V. Sigailo |
 |
PG.2.14 | Cathodic Arc Carbon Plasma-Gas Interaction Effects at Low Pressures of He, Ar and N2 in Fullerene Synthesis |
p1279 | J.-L. Meunier |
Plasma-Particle Interaction |
 |
I.3.01 | Formation of Dense Submicronic Clouds in Low Pressure Ar-SiH4 RF Reactor: Diagnostics and Growth Processes from Monomers to Large Size Particulates |
p1287 | A. Bouchoule, L. Boufendi, J. Hermann, A. Plain, T. Hbid, G. Kroesen, E. Stoffels, W.W. Stoffels |
 |
I.3.02 | Kinetic Models of Plasma-Particle Charge, Momentum and Energy Transfer under Rarefield Flow Conditions |
p1288 | A.G. Gnedovets |
 |
I.3.03 | On Morphology and Growth in Dust-Laden Plasmas |
p1289 | P. Haaland, A. Garscadden, B. Ganguly |
 |
I.3.04 | Effects of Silicon Particles on DC and/or AC Discharge Characteristics in Magnetized Silane Plasmas |
p1295 | H. Fujiyama, S.-C. Yang, Y. Nakajima, Y. Maemura, Y. Matsuda |
 |
I.3.05 | Thermal Plasma Expansion Process for the Controlled Synthesis of Silicon, Carbon, and Silicon Carbide Nanoparticles |
p1301 | D. Hansen, B. Micheel, N. Rao, S. Girshick, J. Heberlein, P. McMurry |
 |
I.3.06 | Detection of Dust Particles by Laser Heating |
p1307 | E. Stoffels, W.W. Stoffels, G.M.W. Kroesen, F.J. de Hoog |
 |
I.3.07 | Physical, Chemical and Microstructural Modification of Powders by Thermal Plasma Treatment |
p1313 | T. Ishigaki, Y. Moriyoshi, J. Jurewicz, F. Gitzhofer, M.I. Boulos |
 |
PI.3.01 | Particle Contaminant Formation and Transport in Microelectronics Fabrication Processes |
p1319 | B.W. Yu, A. Krishnan, M. Kelkar, N.P. Rao, S.L. Girshick |
 |
PI.3.02 | Transport Phenomena During the Vaporization of Metallic Waste Particle in a Plasma Jet |
p1325 | A. Bamrim, G. Flamant, J.M. Badie |
 |
PI.3.03 | Nucleation Phenomena in D.C. High Pressure Electrical Discharges and Post-Production of Ultra-Fine Aerosol |
p1331 | J.P. Borra, D. Boulaud, A. Goldman, M. Goldman |
 |
PI.3.04 | A Study of the Influence of Plasma Jet Confinement on Particle Parameters in Induction Plasma Processing |
p1337 | S. Coulombe, M.I. Boulos |
 |
PI.3.05 | Injection and Trajectories of Particles in DC Plasma Spray Processes |
p1343 | B. Dussoubs, A. Vardelle, K-I Li, M. Vardelle, P. Fauchais |
 |
PI.3.06 | Forces Acting on a Spherical Particle in a Rarefied Plasma |
p1349 | A.G. Gnedovets, A.V. Gusarov, A.A. Uglov |
 |
PI.3.07 | Hydrodynamics and Stability of Plasma Spouted Beds |
p1355 | H. Hamdi, J. Jurewicz |
 |
PI.3.08 | Thermal Plasma Modification of Titanium Carbide Powder - Thermochemical Analysis and Experimental Study |
p1361 | T. Ishigaki, Y. Moriyoshi, T. Watanabe, A. Kanzawa |
 |
PI.3.09 | Electrostatic Field Effects on the Transport of Macroparticles in Magnetized Plasma Ducts |
p1367 | M. Keidar, I. Beilis, RL. Boxman, S. Goldsmith |
 |
PI.3.10 | On the Electrical Charging of Dust Particles in a Capacitively Coupled RF Plasma |
p1373 | U. Kortshagen, G. Mumken |
 |
PI.3.11 | A Model for Nanosize Silicon Particle Formation in a Thermal Plasma Expansion Reactor |
p1379 | B. Micheel, D. Hansen, N. Rao, S. Girshick, J. Heberlein, P. McMurry |
 |
PI.3.12 | Adaptive Phase/Doppler Velocimeter and Its Applications to In-Situ Measurement of Fine Metallic Particles and Charged Particles |
p1385 | A.A. Naqwi |
 |
PI.3.13 | Program Complex for Automation of a Computer Experiment in Plasma Dynamics of a Jet Disperse Systems |
p1391 | O.P. Solonenko, A.P. Zinoviev |
 |
PI.3.14 | Numerical Analysis of Si Particles Injection Parameters Influence on Evaporation Process in Thermal Plasma Reactor |
p1397 | P.Lj. Stefanovic, P.B.Pavlovic, Z.G. Kostic, D.B. Cvetinovic |
Plasma-Surface Interaction |
 |
G.3.01 | Dissociation and Vibrational Deactivation of H2 and D2 on Metallic Surfaces: A Theoretical Survey |
p1405 | M. Cacciatore |
 |
G.3.02 | Fluorination of Silicon in Fluorocarbon RF Discharges Studied by In Situ High-Speed Infrared Ellipsometry |
p1407 | M. Haverlag, J.H.W.G. den Boer, G.H.P.M. Swinkels, G.M.W. Kroesen, F.J. de Hoog |
 |
G.3.03 | In Situ Fourier Transform Infrared Ellipsometry for Monitoring c-Si Etching Process by CF4 Plasma |
p1413 | T. Shirafuji, K. Tachibana, S. Muraishi |
 |
G.3.04 | Comprehensive Study of Reaction Kinetics of Simplest Unsaturated Fluorocarbons in Non-Equilibrium Plasma. Mechanism of Heterogeneous Stages of Plasma-Surface Interactions |
p1419 | G.K. Vinogradov, G.J. Imanbaev, A.G. Timokhov |
 |
G.3.05 | Energy Transfer and Oxygen Atoms Recombination on Refractory Materials. Aging Mechanisms of the Material |
p1425 | F. Nguyen-Xuan, S. Cavvadias, J. Amouroux |
 |
G.3.06 | Oxygen Elimination and New Electronic Properties of Silicon Due to a Treatment by a Thermal Plasma (Argon + 1% of H2 or Argon + 10.6% of He) |
p1431 | I. Cazard-Juvernat, B. Pajot, D. Morvan, J. Amouroux |
 |
G.3.07 | A Thermionic Cathode with Diffused Arc Root for Plasma Generators |
p1437 | L. Lin, Z. Sun, B.Y. Wang, C.K. Wu |
 |
G.3.08 | Numerical Investigations of the Cathode Region of Electric Arcs |
p1443 | A. Kaddani, O. Simonin, C. Delalondre |
 |
G.3.09 | A Simplified Unified Theory of Arcs and Their Electrodes |
p1449 | J.J. Lowke, R. Morrow, J. Haidar |
 |
G.3.10 | Anodic Arc Root Behavior of a Transferred Arc Moving Orthogonally to a Plane Surface |
p1455 | J.M. Sobrino, J.F. Coudert, P. Fauchais |
 |
G.3.11 | Local Current Density and Cathodic Arc Root Shape in a Rotating Thermal Arc |
p1461 | P.T. Eubank, R.J. Munz |
 |
PG.3.01 | D.C. Plasma Jet Heating of a Rotating Cylinder: Modelling and Measuring |
p1469 | D. Dublanche, J.F. Coudert, P. Fauchais |
 |
PG.3.02 | Evolution of the Plasma Flow Characteristics, During the First Hours, After Replacing the Set of Electrodes |
p1475 | M.P. Planche, J.F. Coudert, P. Fauchais |
 |
PG.3.03 | Investigation of the Erosion Behaviour of Graphite and Silicon Carbide by Mass Spectrometry |
p1481 | P. Dabala, M. Auweter-Kurtz |
 |
PG.3.04 | A Study of Excited Nitrogen Assist Chemical Reaction at PTFE Surface Treated by the Discharge in Smaller pd Region |
p1487 | S. Hoshino, M. Yumoto, T. Sakai |
 |
PG.3.05 | Effects of Electrode Size on Electrode Erosion in AC Plasma Torches |
p1493 | M. Iwata, S. Yasui, M. Shibuya |
 |
PG.3.06 | The Chemical Interaction between Plasma-Excited Nitrogen and the Surface of Oxide Catalysts |
p1499 | S. Kameoka, M. Kuroda, T. Kuriyama, S. Ito, K. Kunimori |
 |
PG.3.07 | Vacuum Arc Movement on Various Graphite Cathode Ions Sources for Diamond-Like Arc Films Production |
p1505 | M. Kandah, J.-L. Meunier |
 |
PG.3.08 | Improvement of Steel Surfaces by a Combination of Magnetron Sputtering and Plasma Nitriding |
p1511 | J. Musil, J. Vlcek, V. Jezek, M. Benda, Z. Weiss |
 |
PG.3.09 | Mechanism of Surface Modification of Carbon Black in Plasma |
p1515 | Y.J. Ge, S.G. Chen, D.B. Wang, G.Q. Zhang |
 |
PG.3.10 | Hydrogen Effects in Interaction Between Thermal Ar-H2 Plasma and Metal |
p1521 | M. Suzuki, M. Hirayama, M. Nishikubo, H. Akatsuka |
 |
PG.3.11 | Properties of LaB6-W Electrode |
p1527 | K. Tanaka, M. Ushio |
 |
PG.3.12 | Emission Spectroscopic Diagnostics and Result Comparison of Theoretical and Experimental Investigations in the Cathode Region |
p1533 | X. Zhou, J. Heberlein |
 |
PG.3.13 | Theory of a Cathodic Part of High-Pressure Arc Discharges |
p1535 | M.S. Benilov, A. Marotta |
 |
PG.3.14 | Plasma Cleaning of Steel and Aluminum Studied by Optical Emission Spectroscopy and Langmuir Probe Measurements |
p1541 | C. Barholm-Hansen, H.C. Pedersen |
 |
PG.3.15 | Influence of RF-Cold Plasma Treatment on the Surface Properties of Security Paper |
p1547 | Z.Q. Hua, E. Barrios, J. Evans, F. Denes, R.A. Young |
 |
PG.3.16 | Determination of N2 Atom Density in N2 and N2-CH4 H.F. Flowing Post-Discharges |
p1553 | S. Bockel, A.M. Diamy, A. Ricard |
 |
PG.3.17 | Low Temperature Cleaning of InP Substrates Using H-Atoms. In-Situ Optical Methods for H2 Plasma and Surface Characterization |
p1559 | G. Bruno, M. Losurdo, P. Capezzuto |
 |
PG.3.18 | Dense Medium Plasma Reactions: A New Approach to Plasma Chemistry |
p1565 | F. Denes, R.A. Young |
 |
PG.3.19 | Effects of Corona Discharge Treatment on Enhancement of Seed Germination |
p1571 | T. Watanabe, E. Kumano, A. Kanzawa |
 |
PG.3.20 | Energy Transfer to the Walls at Low Pressure Plasma Processing |
p1577 | H. Kersten, H. Deutsch, H. Steffen |
 |
PG.3.21 | A Low-Pressure R.F. Oxygen Plasma as a Tool for Oxidation: The Treatment of Copper Foils |
p1583 | N. Bellakhal, K. Draou, B. Cheron, M. Lenglet, J.-L. Brisset |
 |
PG.3.22 | Cold Plasma Treatment of Activated Carbon and Its Surface Properties |
p1589 | N. Kurano, H. Yamada, K. Sugiyama |
 |
PG.3.23 | On the Thermophysical Model of Cold Electrodes Erosion |
p1595 | L.I. Sharakhovsky, V.N. Borisjuk, A. Marotta, L.O. da Silva |
 |
PG.3.24 | Axial Scanning of Arc Roots in an Electric Arc Torch |
p1601 | V.N. Borisyuk, A.M. Esipchuk, A. Marotta, A.S. Olenovich, L.I. Sharakhovsky, O.I. Yas'ko |
Diagnostics and Modelling of High Pressure Plasmas |
 |
I.2.01 | Influence of Metallic Vapors on Electric Arc Properties |
p1609 | S. Vacquie |
 |
I2.02 | Influence of Copper and Iron Vapours on an Argon Transferred Arc |
p1611 | J.J. Gonzalez, M. Bouaziz, M. Razafinimanana, P. Gudzy, A. Gleizes, S. Vacquie |
 |
I.2.03 | Analytical Radiative Emission Results for Argon/Copper Thermal Plasmas |
p1617 | J. Menart, E. Pfender, J. Heberlein |
 |
I.2.04 | Time Resolved Measurements of Arc Voltage, Temperature and Velocity in a d.c. Plasma Torch |
p1619 | J.F. Coudert, M.P Planche, P. Fauchais |
 |
I.2.05 | Fluctuations of Light Intensity in Thermal Plasma Jet Generated by Water Stabilized DC Arc Torch |
p1627 | M. Hrabovsky, M. Konrad, V. Kopecky, J. Hlina |
 |
I.2.06 | Electron-Temperature and Electron-Density Profiles in an Atmospheric-Pressure Argon Plasma Jet |
p1633 | S.C. Snyder, L.D. Reynolds, J.R. Fincke, G.D. Lassahn, J.D. Grandy, T.E. Repetti |
 |
I.2.07 | Diagnostics and Modelling of a High-Power R.F. Plasma Flow |
p1639 | M. Cao, M. Rahmane, D.V. Gravelle, G. Soucy, M.I. Boulos |
 |
I.2.08 | Interaction Between Subsonic Gas Flow and a Glydarc Electric Discharge |
p1645 | J.E. Harry, Q. Yuan, M. Dubus |
 |
I.2.09 | Time-iterative Solutions of Inviscid Supersonic d.c. Plasma Jet |
p1651 | B. Jodoin, P. Proulx, Y. Mercadier |
 |
I.2.10 | Mathematical Model for the Calculation of the Impedance of R.F. Inductively Coupled Plasmas |
p1657 | A. Merkhouf, M.I. Boulos |
 |
PI.2.01 | Water Entrainment into Underwater Thermal Plasmas |
p1663 | B. Waldie, E.J. Ryan |
 |
PI.2.02 | New Approach to Application of Classic Methods of Physical and Chemical Kinetics to Analysis of Efficiency of Plasma Technology of Coal Gasification |
p1669 | E.I. Carpenko, B.N. Devaytov, M.P. Zhukov |
 |
PI.2.03 | Computational Study of Enthalpy Probe Measurements in High-Speed Plasma Flow |
p1675 | C.H. Chang, J.D. Ramshaw |
 |
PI.2.04 | Experimental Study of Thermal Plasma Flow and Heat Transfer in a Tube |
p1681 | X. Chen, L. Yu, B. Su |
 |
PI.2.05 | Mass and Energy Transfer Study of the Decomposition of NH3 in an Induction Plasma Reactor |
p1687 | B. Davies, G. Soucy |
 |
PI.2.06 | Multicomponent Mass Transfer in a Plasma Reactor: Comparison of Three Different Diffusion Flux Formulations |
p1693 | M. Desilets, P. Proulx |
 |
PI.2.07 | Dynamic and Static Behaviours of DC Vortex Torch Working With H2 and Ar-H2 |
p1699 | J. Erin, B. Pateyron, G. Delluc, P. Fauchais, M. Labrousse, A. Bouvier |
 |
PI.2.08 | Numerical Simulation of the Position and Rotary Velocity of Arc Spot in a Tubular Arc Plasma Generator with Double Steps |
p1707 | Y. Fan, M. Zhang, L. Fu, J. Xiao, J. Yang, Y. Li |
 |
PI.2.09 | Splitted Arc Discharge of High Pressure |
p1713 | V.I. Golysh, Yu.P. Simonov, V.N. Mukhazhanov |
 |
PI.2.10 | Interaction of Thermal Plasma Jet with the Stream of Injected Liquid |
p1719 | M. Hrabovsky, M. Konrad, V. Kopecky, V. Sember |
 |
PI.2.11 | Voltage Gradient-Current Characteristics of Ar Torch Plasma Normalized by its Experimental Photo-Radius |
p1725 | T. Inaba, M. Endo, Y. Watanabe, M. Shibuya |
 |
PI.2.12 | Net Emission Coefficient for Thermal Plasmas in H2, O2, C, H2O, CF4 and CH4 |
p1731 | H. Riad, J.J. Gonzalez, A. Gleizes |
 |
PI.2.13 | Mechanism and Kinetics of H2S-CO2 Mixture Dissociation in Plasma of a Microwave Discharge |
p1737 | B.V. Potapkin, M.I. Strelkova, A.A. Fridman |
 |
PI.2.14 | RF Multiflux Plasmatron Study. Experimental Measurements and Modelling |
p1743 | D. Morvan, J. Erin, S. Magnaval, J. Amouroux, S. Dresvin, S. Nguen-Kuok |
 |
PI.2.15 | High Enthalpy Plasma Sources for Re-Entry Simulation |
p1749 | S. Laure, M. Auweter-Kurtz, H. Kurtz |
 |
PI.2.16 | 2-D Simulation for a Spherical Top Inductively Coupled Plasma Source |
p1755 | H.-M. Wu, M. Li, Y. Yang, C.-K. Wu |
 |
PI.2.17 | A Physical Modelling of a DC Plasma Torch |
p1761 | J.M. Bauchire, J.J. Gonzalez, A. Gleizes |
 |
PI.2.18 | Plasma Plume Dynamics Metamorphoses during the Plume Laminar-Turbulent Transition |
p1767 | L. Krejci, V. Dolinek, B. Ruzicka, L. Sara, V. Nenicka, J. Hlina |
 |
PI.2.19 | Numerical Simulation of a Non-Equilibrium Plasma Jet in an Applied Magnetic Field Using Three-Fluid Model |
p1773 | H. Nishiyama, T. Saito, S. Kamiyama |
 |
PI.2.20 | Effect of a Magnetic Field on Turbulence of a Non-Equilibrium Plasma Jet |
p1779 | T. Sato, H. Nishiyama, S. Kamiyama |
 |
PI.2.21 | Characterisation of Cascaded Arc Thermal Plasma Source in Argon and Hydrogen: Experiment and Modelling |
p1785 | Z. Qing, D.K. Otorbaev, E.B. Kulumbaev, V.F.Semenov, V.M. Lelevkin, M.C.M. van de Sanden, D.C. Schram |
 |
PI.2.22 | Mass Spectroscopic and Optical Diagnostics of the Arc Discharge with Evaporated Graphite Cathode |
p1791 | G.N. Kurtynina, D.K. Otorbaev |
Characterization of Basic Process in Plasmas |
 |
L.2.01 | Modelling and Diagnostics of Plasma Chemical Processes in Mixed-Gas Arcs |
p1799 | A.B. Murphy |
 |
L.2.02 | The Transport Phenomena in Non-Isothermal Multispecie Plasma |
p1801 | I.D. Kaganovich, L.D. Tsendin |
 |
L.2.03 | The Argon-Hydrogen Expanding Thermal Arc Plasma |
p1807 | R.F.G. Meulenbroeks, R.A.H. Engeln, M.C.M. van de Sanden, J.A.M. van der Mullen, D.C. Schram |
 |
L.2.04 | Theoretical Analysis of Removal of Oxides of Sulphur and Nitrogen in Pulsed Corona |
p1813 | J.J. Lowke, R. Morrow |
 |
L.2.05 | Development of the Localization Method: Application for the Diagnostic of a Plasma Having a Plane of Symmetry |
p1819 | S. Bousrih, S. Megy, E.A. Ershov-Pavlov, J.-M. Baronnet |
 |
L.2.06 | Optical Emission Measurements of an Inductively Coupled Argon Plasma(ICP) |
p1825 | S. Jaffe, R. Hernberg |
 |
L.2.07 | Energy Balance in H2 - N2 Glow Discharges |
p1831 | R. Nagpal, A. Garscadden |
 |
L.2.08 | Kinetic Analysis of Efficient H- Formation in Laser Irradiated H2 |
p1837 | A. Garscadden, R. Nagpal |
 |
L.2.09 | Property of RF Capacitive Discharge Containing Oxygen Negative Ions |
p1843 | H. Amemiya, N. Yasuda, M. Endo |
 |
PL.2.01 | Mass Spectrometric Determination of Reaction Rates During Plasma Processing of Layers |
p1849 | J. Trnovec, V. Martisovits, G.Cicala, P. Capezzuto, G. Bruno, R. Jurani |
 |
PL.2.02 | Particle Analysis at the Electrode Surfaces of an rf Discharge |
p1855 | M. Zeuner, J. Meichsne |
 |
PL.2.03 | Non-Equilibrium Properties of Electric Arc Plasma and Combined Methods of Its Diagnostic |
p1861 | I.L. Babich, A.I. Cheredarchuk, A.N. Veklich, V.A. Zhovtyansky, T. Shevchenko |
 |
PL.2.04 | Comprehensive Study of Reaction Kinetics of Simplest Unsaturated Fluorocarbons in Non-Equilibrium Plasma. Mechanisms of Gas Phase Transformations |
p1867 | G.K. Vinogradov, A.G. Timokhov, A.I. Zimenok |
 |
PL.2.05 | Magnesium as a Representative Analyte Metal in an Argon Inductively Coupled Plasma |
p1873 | J. Vlcek, L. Forejt |
 |
PL.2.06 | Pressure Dependence of Discharge By-Products from Ar-CH4-H2 and Ar-CO2-H2 Mixture ICP Plasmas |
p1879 | J.S. Chang, H. Hayashi, C. Daza, D.C. Lee, C. Decey, K. Nagai |
 |
PL.2.07 | Study of the Plasma Chemistry of Sealed-Off CO2 Lasers with Novel Mass-Spectrometric Technique. Part I. Experimental Technique |
p1885 | Y. Wang |
 |
PL.2.08 | On Generalization of Current-Voltage and Thermal Characteristics of Electric Arc |
p1891 | A.F. Bublievski, A.M. Esipchuk, A. Marotta, O.I. Yas'ko |
 |
PL.2.09 | On the Adequacy of Approximation Methods for the Current-Voltage Characteristics of Arc Plasma Torches |
p1897 | O.I. Yas'ko, A. Marotta, T.V. Laktyushina, L.O.M. da Silva |
 |
PL.2.10 | Effect of Gas Flow Rate and Electrodes Diameter Variation in the Similarity of Plasma Torches Characteristics for Different Methods of Experimental Data Approximation |
p1903 | O.I. Yas'ko, A. Marotta, T.V. Laktyushina, L.O.M. da Silva |
 |
PL.2.11 | Current-Voltage Characteristics Generalization for Plasma Torches Operating with Different Gases |
p1909 | O.I. Yas'ko, A. Marotta, T.V. Laktyushina, L.O.M. da Silva |
Plasma Assisted CVD |
 |
K.1.01 | Plasma Deposition of Amorphous Silicon Alloys from Fluorinated Gases |
p1917 | G. Cicala |
 |
L.1.01 | Synthesis of Carbon Clusters and Inorganic Thin Films by Low Temperature Plasma CVD under Atmospheric Pressure |
p1918 | H. Koinuma |
 |
N.2.01 | Diamond Crystallization from Gas Phase and Carbon Allotropy |
p1919 | V.P. Varnin |
 |
N.2.02 | Fast Deposition of Amorphous Layers |
p1920 | M.C.M. van de Sanden, D.C. Schram |
 |
K.1.02 | Plasma Chemical Vapor Deposition and Characterization of Hydrogenated Amorphous Silicon from Silane and Dichlorosilane Mixtures |
p1921 | N. Hata, I.S. Osborne, A. Matsuda |
 |
K.1.03 | Mass Spectrometry and Power Measurements for Kinetics and Mechanism Investigation of Silane Glow Discharges |
p1927 | N. Spiliopoulos, S. Stamou, D. Mataras, D. Rapakoulias |
 |
K.1.04 | Thin Layer Deposition Under High Energy Metal Ions Bombardment |
p1933 | G. Musa, H. Ehrich |
 |
PK.1.20 | TEOS/O2 MMP-DECR Plasma Deposition. Growth Processes and Analytical Modelling |
p1939 | R. Delsol, Y. Segui, P. Raynaud, B. Despax |
 |
K.1.06 | Deposition of Silica Thin Film on the Surface of Powder by PCVD Under Atmospheric Pressure |
p1945 | T. Mori, S. Okazaki, T. Inomata, M. Kogoma |
 |
K.1.07 | Reactor Modelling for RF Plasma Deposition of SixNy-H Comparison Between Two Flow Arrangements |
p1951 | H. Caquineau, G. Dupont, B. Despax |
 |
K.1.08 | Interface Formation Controlled by an Electro-Magnetron |
p1957 | F. Olcaytug, H. Schalko, M.F. Ebel, H. Ebel, K. Piplits, H.K. Yasuda |
 |
L.1.02 | Hard Material Layers on the Basis of the System Ti-Al-C-O-N Deposited by Pulsed DC-Plasma |
p1963 | K. Bartsch, W. Zulch, A. Leonhardt |
 |
L.1.03 | Characterization of Oxygen/TEOS Plasmas in a Helicon Diffusion Reactor using Mass Spectrometry and Optical Emission Spectroscopy |
p1969 | A. Granier, A.J. Perry, F. Nicolazo, C. Vallee, A. Goullet, G. Turban, B. Grolleau |
 |
L.1.04 | Plasma Deposition Chemistry of Fluorinated Silicon Oxide Films |
p1975 | S. V. Nguyen, M.J. Shapiro, T. Matsuda, D. Dobuzinsky, C.T. Dziobkowski |
 |
L.1.05 | Deposition of Transparent Conductive Tin Oxide Films by PACVD from a Mixture of TMT (Tetra methyl Tin) + O2 + Ar |
p1981 | F. Arefi-Khonsari, Y. Farber, E. Benghozi, I. Mabille-Rouger, J. Amouroux |
 |
L.1.06 | Plasma-Assisted Evaporation of Titanium Dioxide Films |
p1987 | Z. Alam, M. Kano, H. Uyama |
 |
L.1.07 | The Preparation of YBa2Cu3O7-X-Films by Plasma Flash Evaporation |
p1993 | B. Michelt, G. Lins, R.J. Seebock |
 |
L.1.08 | LaMnO3 Perovskite Thin Film Deposition, from Aqueous Nitrate Solutions of La and Mn, in a Low Pressure Plasma Expanded Through a Nozzle |
p1999 | S.F. Miralai, D. Morvan, J. Amouroux, A. Naoumidis, H. Nickel, R. Avni |
 |
L.1.09 | XPS Analyses of Zinc Containing Films Deposited by a Cold Remote Nitrogen Plasma |
p2005 | B. Mutel, A. Ben Taleb, O. Dessaux, P. Goudmand, L. Gengembre, J. Grimblot |
 |
N.2.03 | Secondary Discharge Induced Nonequilibrium Chemistry in a CVD Diamond DC Arcjet Reactor |
p2011 | S.K. Baldwin Jr., T.G. Owano, C.H. Kruger |
 |
N.2.04 | Diagnostics of Boundary Layer Chemistry in Thermal Plasma CVD |
p2017 | T.G. Owano, E.H. Wahl, C.H. Kruger |
 |
N.2.05 | Experimental Study of Diamond Film Morphology and Surface Chemistry in RF Induction Plasma CVD |
p2023 | J.W. Lindsay, H. Han, S.L. Girshick |
 |
N.2.06 | Deposition Area, Growth Rate, and Arc Power Scaling Laws for Diamond Film Deposited by Arc-Heated Gas Flows |
p2029 | R.M. Young |
 |
N.2.07 | Chemistry in a Supersonic Vacuum Plasmajet |
p2035 | H. Pauser, J. Laimer, H. Stori |
 |
N.2.08 | Preparation of Cubic Boron Nitride Films by RF Bias Sputtering |
p2041 | O. Tsuda, Y. Yamada, Y. Tatebayashi, T. Yoshida |
 |
N.2.09 | Initial Stage of Cubic Boron Nitride Growth by Low Pressure ICP-CVD |
p2047 | T. Ichiki, S. Amagi, T. Yoshida |
 |
N.2.10 | Deposition of Composite Metal/C:H Films and Their Basic Properties |
p2053 | H. Biederman, P. Hlidek, J. Pesicka, D. Slavinska, V. Stundzia, J. Prokes, J. Zemek |
 |
PK.1.01 | Synthesis of Tantalum-Oxide Thin Film with Reactive DC-Magnetron Sputtering in Electron-Cyclotron-Resonance (ECR) Excited Ar + O2 Plasma |
p2059 | T. Akitsu, H. Miyashita, Y. Nakagawa, H. Matsuzawa, T. Omata, T. Sukegawa, S. Nakamae, H. Sueki |
 |
PK.1.02 | Determination of Energy Distribution Functions of Fluxes in a D.C. Magnetron Discharge |
p2065 | E. Blachere, C. Lefumeux, D. Degout |
 |
PK.1.03 | Space Resolved Optical Emission Spectroscopy of Ni(CO)4 Interaction with a Cold Remote Nitrogen Plasma |
p2071 | A. Brocherieux, P. Supiot, O. Dessaux, P. Goudmand |
 |
PK.1.04 | Deposition of BaTiO3 Thin Films by Plasma MOCVD Method |
p2077 | T. Chiba, O. Matsumoto |
 |
PK.1.05 | Optical Emission Study of the Laser Plasma Plume Produced During Y-B-C-O Superconducting and Pb-Zr-Ti-O Ferroelectric Film Preparation |
p2083 | K. Ebihara, H. Kurogi, Y. Yamagata, T. Ikegami, B.Y. Tong |
 |
PK.1.06 | Plasma Diagnostics and Film Characterization of TiN Films Deposited in a Hollow Cathode Arc Discharge |
p2089 | C. Eggs, H. Kersten, H.-E. Wagner, H. Wulff |
 |
PK.1.07 | Deposition of Polysiloxane Films Using CO2 Laser Evaporation Assisted by Remote O2 Plasma and Its Transformation to Silicon Oxide Films |
p2095 | S. Hattori, T. Fujii, T. Yokoi, M. Hiramatsu, M. Nawata, M. Hori, T. Goto |
 |
PK 1.08 | Selective Control of Particles by Electron-Beam-Excited Plasma and Its Application |
p2101 | S. Ikezawa, R. Miyano, R. Kitada, S. Izumi |
 |
PK.1.09 | Properties of TiN, Ti(C,N), TiC Films Prepared by Arc Ion Plating |
p2107 | T. Takeda, T. Sato, S. Ito, H. Yumoto, K. Akashi |
 |
PK.1.10 | Effect of Nitrogen on Cathode Spot Characteristics in Arc Ion-Plating of TiN |
p2113 | G. Kim, J.-L. Meunier, F. Ajersch |
 |
PK.1.11 | Process Diagnostics during the Deposition of Cubic Boron Nitride |
p2119 | R. Pintaske, M. Schaller, N. Kahl, J. Hahn, F. Richter |
 |
PK.1.12 | Roles of H Radicals in the Low Temperature Growth of Poly-Si Films by Plasma CVD Using SiF4/SiH4/H2 |
p2125 | T. Shirafuji, K. Tachibana, T. Morita |
 |
[PK.1.13 | Hydrodynamic Investigation of a Low-Pressure Plasma Expanded Through a Nozzle (PETN) for Ceramic Oxides Depositions from Nitrate Precursors |
p2131 | S.F. Miralai, E. Francke, D. Morvan, J. Amouroux, R. Avni |
 |
PK.1.14 | In Situ Characterization of Plasma-MOCVD of Ti-C-N Thin Films |
p2137 | S. Peter, F. Richter |
 |
PK.1.15 | Improved Method for the Measurement and Control of the Actual Power Dissipated in RF Glow Discharges |
p2143 | N. Spiliopoulos, D. Mataras, D. Rapakoulias |
 |
PK.1.16 | Supersonic Gas Jets Activated by an Electron Beam |
p2149 | G.I. Sukhinin |
 |
PK.1.17 | Active Control of Nucleation Process in Plasma CVD by Ultra-Short High-Voltage Pulses |
p2155 | K. Okazaki, S. Yasuda |
 |
PK.1.18] | Surface Morphology Measurements and Particle Formation of SiOx Films Deposited Using Low Frequency Plasma CVD Method |
p2161 | T. Yamaguchi, M. Shimozuma, H. Date, N. Sakamoto, H. Matsuura, H. Tagashira |
 |
PN.2.01 | Deposition of Diamond-Like Films in Hydrocarbon Plasma of Vacuum Arc and Unbalanced DC Magnetron |
p2167 | V.P. Anisimov, I.A. Anisimova, D.K. Otorbaev |
 |
PN.2.02 | Dynamics of KrF Excimer Laser Plasma Plume Produced During Diamondlike Carbon Thin Film Preparation |
p2173 | S. Aoqui, T. Ikegami, Y. Yamagata, K Ebihara |
 |
PN.2.03 | Microwave Surfatron System for Diamond Film Depositions |
p2179 | L. Bardos, H.Barankova, S. Berg |
 |
PN.2.04 | Plasma Diagnostics and Modelling in Plasma Enhanced BN-Layer Deposition |
p2185 | A. Lunk, A. Neuffer, K.-L. Barth |
 |
PN.2.05 | A Surface-Wave Driven Plasma Reactor for Thin Diamond Film Deposition: Parametric Study of the Process Parameter Influence on Film Roughness |
p2191 | C.F.M. Borges, M. Moisan, D. Guay |
 |
PN.2.06 | Formation of Carbon Nitrides CNx Films Assisted by a TEA CO2 Laser Ablation Graphite in a Remote Nitrogen Plasma |
p2197 | C. Jama, O. Dessaux, N. Duez, C. Dupret, P. Goudmand, L. Gengembre, J. Grimblot |
 |
PN.2.07 | Hard Amorphous Hydrogenated Carbon Films Deposited with an Expanding Thermal Plasma |
p2203 | J.W.A.M. Gielen, P.R.M. Kleuskens, M.J. van der Zande, A.G.M Kiers, M.C.M. van de Sanden, D.C. Schram |
 |
PN.2.08 | Mass Spectrometric Analysis of a Thermal Plasma Used for CVD of Diamond Films |
p2209 | P.G. Greuel, J.T. Roberts, D.W. Ernie |
 |
PN.2.09 | Diamond Deposition at Low Sustrate Temperatures in a Thermal Plasma Reactor |
p2215 | Q.Y. Han, M. Asmann, J.V.R. Heberlein, E. Pfender |
 |
PN.2.10 | ID Diffusion Model for Moderate Pressure H2 Plasmas Used for Diamond Films Deposition |
p2221 | K. Hassouni, S. Farhat, C.D. Scott, A. Gicquel |
 |
PN.2.11 | Diamond Deposition from Ar-CO2-CH4 Plasmas |
p2227 | K. Itoh, O. Matsumoto |
 |
PN.2.12 | Preparation of Boron Nitride Thin Films by Sputtering Using R.F. Inductively Coupled Plasma |
p2233 | Y. Kasori, S. Ito, K. Akashi |
 |
PN.2.13 | Langmuir Probe and Energy-Mass Spectroscopy Measurements in ECWR Plasmas for Diamond Deposition |
p2239 | W. Kasper, P. Awakowicz |
 |
PN.2.14 | Two-Dimensional Diamond Chemical Vapor Deposition Simulation |
p2245 | D. Kolman, J. Heberlein, E. Pfender, R. Young |
 |
PN.2.15 | Modelling of RF Plasma Discharges of Polyatomic Gases for Carbon Film Deposition |
p2247 | K. Nagayama, B. Farouk, Y.H. Lee |
 |
PN.2.16 | Diamond Deposition on the Substrate Pretreated in N2-C2 H2 Plasma |
p2255 | S. Narumi, T. Sato, S. Ito, K. Akashi |
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PN.2.17 | Preparation of Diamond Films in a Low Pressure Inductively Coupled RF Plasma |
p2261 | K. Okada, S. Komatsu, T. Ishigaki, S. Matsumoto |
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PN.2.18 | Diamond Synthesis by RF Thermal Plasma CVD |
p2267 | D.W. Park, H. Park |
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PN.2.19 | Deposition of a-C:HIDiamond Thin Film on the Heated Fe/Si Substrate in CH4 rf Discharge |
p2273 | K. Saitoh, N. Mutsukura |
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PN.2.20 | Diamond Film Deposition in an Inductively Coupled Plasma Reactor |
p2279 | P.R. Taylor, W. Liang |
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PN.2.21 | Microwave CH4/H2 Plasma Composition Analysis for Diamondlike Carbon Film Synthesis |
p2285 | T. Yasui, H. Tahara, T. Yoshikawa |
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PN.2.22 | Deposition of Hard Carbon Film in CH4 RF Discharges Mixed with Ar and Xe |
p2291 | K. Yoshida, N. Mutsukura |
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PN.2.23 | Diamond Film Synthesized by MW Plasma CVD and Computation Modelling of its Optical Parameters |
p2297 | C.Q. Zheng, J.G. Ran, Z.G. Yu, S.W. Jiang, L. Gou |
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PN.2.24 | Process Characterization of CVD Diamond from Liquid Precursors |
p2303 | Q.D. Zhuang, P. Schwendinger, C. Hammerstand, J. Heberlein, E. Pfender, R. Young |
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PN.2.25 | Mass Spectrometric Diagnostics and Modelling of Selected Species in CH4/H2 and C2H2/H2 Plasmas |
p2309 | C.G. Schwarzler, O. Schnabl, J. Laimer, H. Stori |
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PN.2.26 | A New RF+DC Plasma CVD Method for Diamond Deposition |
p2315 | S. Matsumoto, K.K. Chattopadhyay |
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PN.2.27 | Characteristics of c-BN/Diamond Bi-Layered Coatings |
p2321 | C. Tsai, K. Ikeda, F. Kamikubo |
Plasma Metallurgy |
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K.2.01 | Plasma Processing of Dusts and Residues |
p2325 | D. Neuschutz |
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K.2.02 | Numerical Modelling of Metallic Bath Heating with Transferred Arc |
p2327 | L. Trenty, A. Bouvier, C. Delalondre, O. Simonin, J.B. Guillot |
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K.2.03 | Effect of N2 and CO2 Additions on Arc Voltage and Steel Composition During Argon Plasma Heating of Steel Melts |
p2333 | D. Neuschutz, A. Stuber |
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K.2.04 | Numerical Modelling of AC Electric Arcs |
p2339 | H.L. Larsen, A. Hildal, V.G. Sevastyanenko, J.A. Bakken |
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K.2.05 | Plasma Transferred Arc Reactor (P<40kW) to Study the Carbothermic Reduction of Oxidized FeSi Fine Particles |
p2345 | F. Petit, A. Grimaud, P. Fauchais |
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K.2.06 | Induction Plasma Synthesis of Al-Ni-Mo Intermetallic Powders as Precursors Alloys for Alkaline Water Electrolysis Cathodes |
p2351 | F. Berube, J. Jurewicz, F. Gitzhofer |
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K.2.07 | Numerical Simulation of Si-O-C Arcs and Its Radiative and Transport Properties |
p2357 | V.G. Sevastyanenko, L. Gu, J.A. Bakken |